Skip to content Skip to sidebar Skip to footer

Project report – Adenso in research

Project report: Adenso as a partner of the research industry at our longstanding partner, HZDR Innovation GmbH, Dresden-Rossendorf

“Wafers with high-energy ion implantation”

To this end, Adenso supplies products and know-how which are used directly on site for the latest technology and subsequent worldwide production.
The Adenso cleanroom with approx. 60sqm in cleanroom class ISO6 (5) is installed and has been started up.
The process chamber with Adenso WHM WaferHandlingModules has been delivered and the startup on the beamline has been started. Functions are tested and the processes are gradually started up and production is started. In several weeks, an Adenso DTS220X device tester sorter in the cleanroom, which carries out the automatic sorting of the wafers, is added in order to map a potential throughput.

The new research system, among other things, is made up of these Adenso products:

  • CLE 005 cleanroom

  • WHM230I implanter module
  • MP
-Sorter DTS220X

The implanter module is made up of a standard handling module from the Adenso WHM230 series and a customised process module.
The implanter module and sorter are each equipped with the Adenso system control, which has been equipped with a clear and easy to use operator interface and visualisation (HMI).

Adenso has already successfully realised more than 300 projects and delivered more than 80 WHR WaferHandlingRobots, chiefly for the production of semiconductors.

Your contact and expert at Adenso:
Uwe Beier, Managing Director
Tel: +49 351 79 59 79 7-0

The press report on this in the Sächsischen Zeitung newspaper of 27/09/2018


HZDR Innovation GmbH was founded by the Helmholtz-Zentrum Dresden-Rossendorf (HZDR) and GWT-TUD GmbH with the objective of using the existing, partly worldwide unique infrastructures at the HZDR in the best possible way. HZDR Innovation GmbH uses the equipment and technologies in the ion beam centre to make the starting materials more resistant, consistent and efficient by ion implantation.

“Use of the ion beam centre for industrial orders from medical engineering, the semiconductor and automotive industry, is increasing and is thus one of the most important international user centres”,

says the Managing Director of HZDRi, Prof Andreas Kolitsch.

Go to Top