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Tailored VAC.ROBOTICS solutions
- Simple live configuration of your individual VAC.ROBOTICS cluster tool
- Time saving for your enquiry: Download your individualised Adenso Cluster.Platform with all data
- Integration of up to 8 individual process ports
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Substrate sizes up to 330mm ROUND and SQUARE
- G12 (210x210mm)
- CoPoS: Gen1 (310x310), Gen2 (515x515), GenX (600x600)
- Add LLM LoadLock.Modules for loading multiple substrates
- Use LIM LINK.Modules to create complex Vacuum.Cluster tools
- Add options according your application requirements.
- Choose your automation level (CMD / MASTER / MES - interface)
Configure your individual Adenso WHM wafer handling module now:
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