Adenso VSC
VSC VacuumSuitcase
Adenso’s VSC VacuumSuitcase is a mobile substrate transport solution for vacuum systems. An adapter set is used to dock the transport box onto a free port of a WHM WaferHandling.Module (or alternative tools). The WHR WaferHandling.Robot loads the respective substrate into the VSC which, after undocking, then transports it vacuum-tight to the next tool where it can be further processed.
Adenso VSC
Your advantages
- Lightweight and easy to use
- Substrate dispatch in process mode
- Retention of the necessary vacuum environment during transport
- Suitable for all types of substrates – round or square wafers, thin wafers and carriers
- VAT vacuum gate valves as established interface standard worldwide
- Adaptable to all standard cluster tools by means of an adapter
- Overcomes local equipment and resource deficits: Worldwide docking onto spatially separated systems
- … and thus the creation of new possibilities and resources for research and development!
Cleanroom classes
CleanTec.Solutions
Our clean booths can be operated up to ISO class 5 in accordance with EN ISO 14644-1:2015 with optional filter fan units (FFU). Adenso frequently implements higher cleanroom classes up to ISO class 3 as a general contractor working together with experienced partners.
All Adenso.Robots are designed up to class 3.
