WHM modules
Special handling units for vertical handling tasks
Rely on the proven handling solutions of the Adenso VAC.ROBOTICS platform and be prepared for rapidly increasing customer and process requirements
Module
VERTICAL MASK / SUBSTRATE HANDLING
is becoming increasingly essential for sensitive substrates and new process technologies in the fields of Implantation, Lithography, AtomicLayer-Etching/Deposition (ALE/ALD), advanced Packaging and Testing.
„VERTICAL“ refers here to a vertical orientated spatial orientation of the substrate during process handling.
The demands placed on kinematics and real-time control of vertical handlings (compared to simple horizontal versions) are enormous – so it’s good to know that these solutions are already available and validated by real-world deployments in major fabs.
Available for ATM, HVAC, UHV.
Module WAM
Your advantages
- optimized orientation for sensitive substrates
- direct load/unload in process orientation
- no unneccessary tilting movements