Adenso continues to develop its system portfolio in the area of the Cluster Robot.Platform and now offers suitable temperature control modules for every substrate size:
COOLING.Modules: cooling of substrates after thermal processes
HEATING.Modules: Heating substrates as process preparation
In many cases, the customer processes need high process temperatures. If the substrates are loaded into the process without their temperature being adjusted beforehand, a heating period is required in the main process time – thus using up valuable process time. The same applies to the cooling phase after such high-temperature processes.
The HEAT/COOL.Modules are easily docked onto the central Robot.Platform. On delivery of the Robot.Platform, the additional modules are already set up, tested and operational. They can also be already configured with the ROBOT.Configurator. And the selected modules are naturally also taken into account in the adControl master interface.
Augment the Adenso system environment of the Robot.Platform and save valuable process time – the new COOLING. and HEATING.Modules for every substrate size