Network and strong partners
Europe supports Saxony
• Trade fairs, foreign trade: LOPEC 2019
• Trade fairs, foreign trade: Semicon 2019
•Trade fairs, foreign trade: SemiExpo Russia 2019
• Trade fairs, foreign trade: nano tech 2018
• Trade fairs, foreign trade: Semicon Europa 2017
• Trade fairs, foreign trade: LOPEC 2017
• InnoExpert
• R&D Joint Project Funding
• Innovation Award
The objective of the project is to expand the control unit of the WHR handling robot to include substrate functions in the system. This includes functions for commanding load-lock modules, for registering substrates in transport cassettes (mapping) and for localisation of the substrates in the system. In addition, the WHR protocol will be expanded to include additional commands for external commanding and the ServiceTerminal startup and parameterisation software to include substrate monitoring functions in the system.
Bundesministerium für Wirtschaft und Klimaschutz
The German Federal Industry for Economic Affairs and Climate Action (Bundesministerium für Wirtschaft und Klimaschutz, BMWK) funds the project: