The Adenso wafer handling chamber becomes even more receptive
Wafer handling modules with 6 process ports
4 to 5 slots were most recently stand in the Adenso handling module with integrated WHR-VAC wafer handling robot. This unit is optimised for the handling of substrate carriers in the high vacuum. The new module available offers 6 slots for even more processes or pass-throughs into other module chambers. Even more processes can therefore be handled in the same space.
As in the ISS space station, the Adenso modules can be compiled to meet the respective process requirements in order to carry out the process in the high vacuum. From the test system with 2 chambers to the (planned) module with up to 8 process stations, all requirements from research to production can be represented. In particular, the equipment with the right WHR-VAC wafer handling robot, from large to ultra-large with three times the range of known solutions, enables the coupling and interworking of multiple process modules.
Adenso offers cross-industry, horizontal competencies and technologies in engineering, vacuum and automation. For Adenso customers, specific prototypes, research modules and production facilities in every dimension are the basis for worldwide successful business models. With an eye for market needs, Adenso also develops its own products and special solutions for cluster handling and high vacuum.
Your contact and expert at Adenso:
Uwe Beier, Managing Director
Tel: +49 351 79 59 79 7-0
uwe.beier@adenso.de
www.UTG.solutions
