{"id":42106,"date":"2018-09-30T22:38:31","date_gmt":"2018-09-30T20:38:31","guid":{"rendered":"http:\/\/new-adenso.waferhandling.solutions\/42106\/"},"modified":"2023-12-13T12:52:11","modified_gmt":"2023-12-13T11:52:11","slug":"42106","status":"publish","type":"post","link":"https:\/\/adenso.solutions\/en\/42106\/","title":{"rendered":"World firsts in wafer handling"},"content":{"rendered":"\t\t
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Six modules, including three world firsts, for the WHM 330X<\/p>

Together with the presentation of the new WHM330X WaferHandlingModules and thus the expansion of the series, especially for 300mm wafers in the vacuum, Adenso is presenting six other new products in this system, including three world premieres:<\/strong><\/p>

Three world firsts and three other fine modules:
<\/strong><\/p>

  1. STEALTH CARRIER for CRYOGENIC environment<\/a>
    <\/strong>The special carriers are thermally almost invisible and are therefore particularly suitable for environments with liquid gases such as helium up to 4.2K.
    For all types of substrates: Wafers 300\/200\/150\/100\/50mm, glass\/ceramic\/sapphire substrates, devices\/chips, \u2026<\/li>
  2. WHM330X4 handling robot<\/a> with up to 4 end effectors <\/strong>(until now, a maximum of 2 EE for handling robots is the customary market standard)
    For the highest throughput and productivity and maximum flexibility, as different types of EE can also be installed (wafers, carriers, cassettes, …)<\/li>
  3. FOUP300 VAC-LOAD-PORT<\/a>
    <\/strong>for the direct inward transfer of 300mm wafers in cluster tools without (!) the atmospheric handling robots usual to date saves an unbelievable amount of space and costs<\/li>
  4. LLM330 Load Lock Module<\/a>
    <\/strong>for 300mm wafers\/carriers\/magazines<\/li>
  5. WAM300 Wafer Alignment Module<\/a>
    <\/strong>for automatic WaferAlignment within the vacuum environment<\/li>
  6. MLL330 Manual Load Lock<\/a>
    <\/strong>for manual loading\/unloading of substrates which can be equipped with heating\/cooling chucks for upstream\/downstream temperature control     Brochure download.pdf<\/a><\/li><\/ol>

    By doing without the use of atmospheric handling robots, two of the new Adenso FOUP300-VAC LOAD PORTS save around 80% space in the cleanroom. In addition to investment and operating costs.<\/p>

    \u00a0<\/p>

    Adenso Managing Director Uwe Beier: \u201cIndividually or in combination, the new Adenso wafer handling modules are an important milestone for the streamlined development of products for industry 4.0 and the internet of things.\u201d<\/p><\/blockquote>

    Dirk Hilbert Oberb\u00fcrgermeister (mayor) of the Saxon State Capital, Dresden at the Adenso stand at the Semicon EU:<\/p>

    \u201cIt is remarkable and pleases me to see the innovations that Dresden firms are presenting hear at the Semicon.\u201d<\/p><\/blockquote>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t

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