{"id":44852,"date":"2026-04-20T07:18:23","date_gmt":"2026-04-20T05:18:23","guid":{"rendered":"https:\/\/adenso.solutions\/vac-robotics\/whm-waferhandling-module\/ion-implantation\/"},"modified":"2026-04-20T08:11:06","modified_gmt":"2026-04-20T06:11:06","slug":"ion-implantation","status":"publish","type":"page","link":"https:\/\/adenso.solutions\/en\/vac-robotics\/whm-waferhandling-module\/ion-implantation\/","title":{"rendered":"Ion.Implantation"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"44852\" class=\"elementor elementor-44852 elementor-44834\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-a76f8b6 elementor-section-boxed elementor-section-height-default elementor-section-height-default sc_fly_static\" data-id=\"a76f8b6\" data-element_type=\"section\" data-e-type=\"section\" id=\"endstations\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-extended\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-7d71b3d sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"7d71b3d\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-83a43cb sc_height_huge sc_fly_static elementor-widget elementor-widget-spacer\" data-id=\"83a43cb\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-0d6c4e7 elementor-reverse-mobile elementor-section-boxed elementor-section-height-default elementor-section-height-default sc_fly_static\" data-id=\"0d6c4e7\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-extended\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-6f63f2c sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"6f63f2c\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-6685c72 elementor-section-content-middle elementor-section-boxed elementor-section-height-default elementor-section-height-default sc_fly_static\" data-id=\"6685c72\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-inner-column elementor-element elementor-element-a6cd0ac sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"a6cd0ac\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-cac755d up-translateZ-elem no-title sc_fly_static elementor-widget elementor-widget-image\" data-id=\"cac755d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" data-src=\"https:\/\/adenso.solutions\/wp-content\/uploads\/elementor\/thumbs\/180706_Adenso_EndStation-UB-1810-075xx_opt-rm9qt0e2vctctr4sud3q1k4lyvxdod90w3s3yhskzo.jpg\" title=\"180706_Adenso_EndStation UB 1810-075xx_opt\" alt=\"180706_Adenso_EndStation UB 1810-075xx_opt\" src=\"data:image\/svg+xml;base64,PHN2ZyB3aWR0aD0iMSIgaGVpZ2h0PSIxIiB4bWxucz0iaHR0cDovL3d3dy53My5vcmcvMjAwMC9zdmciPjwvc3ZnPg==\" class=\"lazyload\" style=\"--smush-placeholder-width: 560px; --smush-placeholder-aspect-ratio: 560\/570;\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-inner-column elementor-element elementor-element-5327a47 sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"5327a47\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-a91c806 sc_layouts_hide_on_mobile sc_fly_static elementor-widget elementor-widget-spacer\" data-id=\"a91c806\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d9a6b25 up-translateZ-elem no-title sc_fly_static elementor-widget elementor-widget-image\" data-id=\"d9a6b25\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" data-src=\"https:\/\/adenso.solutions\/wp-content\/uploads\/elementor\/thumbs\/180706-313-Adenso_EndStation-IonImplanter_137xx_opt-rm9qsvosr5s4z8dhp0yaukqk9hrvyq6dng1gd639vc.jpg\" title=\"180706 313 Adenso_EndStation-IonImplanter_137xx_opt\" alt=\"180706 313 Adenso_EndStation-IonImplanter_137xx_opt\" src=\"data:image\/svg+xml;base64,PHN2ZyB3aWR0aD0iMSIgaGVpZ2h0PSIxIiB4bWxucz0iaHR0cDovL3d3dy53My5vcmcvMjAwMC9zdmciPjwvc3ZnPg==\" class=\"lazyload\" style=\"--smush-placeholder-width: 300px; --smush-placeholder-aspect-ratio: 300\/300;\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-inner-column elementor-element elementor-element-4981179 sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"4981179\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-dbda509 sc_fly_static elementor-widget elementor-widget-trx_sc_title\" data-id=\"dbda509\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"trx_sc_title.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div\t\tclass=\"sc_title sc_title_default\" ><span class=\"sc_item_subtitle sc_title_subtitle sc_item_subtitle_above sc_item_title_style_default\">Module<\/span><h3 class=\"sc_item_title sc_title_title sc_item_title_style_default sc_item_title_tag trx_addons_inline_1520015207\"\n\t\t\t><span class=\"sc_item_title_text\">EndStations<\/span><\/h3><div class=\"sc_item_descr sc_title_descr\"><p>Ion implantation of substrates such as semiconductor wafers takes place in so-called end stations or implanter stations.<\/p>\n<\/div><\/div>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-07f2996 sc_fly_static elementor-widget elementor-widget-trx_sc_button\" data-id=\"07f2996\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"trx_sc_button.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div\tclass=\"sc_item_button sc_button_wrap\" ><a href=\"#anfrage\" class=\"sc_button sc_button_hover sc_button_size_normal sc_button_icon_left color_style_dark\" target=\"_blank\" ><span class=\"sc_button_text\"><span class=\"sc_button_title\">Enquire now!<\/span><\/span><\/a><\/div>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-70e9a52 elementor-section-boxed elementor-section-height-default elementor-section-height-default sc_fly_static\" data-id=\"70e9a52\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-extended\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-b4dfe00 sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"b4dfe00\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-50fbb92 sc_height_huge sc_fly_static elementor-widget elementor-widget-spacer\" data-id=\"50fbb92\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-55d5ba1 scheme_default elementor-section-boxed elementor-section-height-default elementor-section-height-default sc_fly_static\" data-id=\"55d5ba1\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-extended\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-0b25056 sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"0b25056\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-ca6bd2e sc_fly_static elementor-widget elementor-widget-trx_sc_title\" data-id=\"ca6bd2e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"trx_sc_title.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div\t\tclass=\"sc_title sc_title_default\" ><span class=\"sc_item_subtitle sc_title_subtitle sc_item_subtitle_above sc_item_title_style_default\">Module WAM<\/span><h3 class=\"sc_item_title sc_title_title sc_item_title_style_default sc_item_title_tag trx_addons_inline_983545771\"\n\t\t\t><span class=\"sc_item_title_text\">These consist mainly of the following modules:<\/span><\/h3><\/div>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5d1b7d9 sc_height_small sc_fly_static elementor-widget elementor-widget-spacer\" data-id=\"5d1b7d9\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-7ac4f44 elementor-section-boxed elementor-section-height-default elementor-section-height-default sc_fly_static\" data-id=\"7ac4f44\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-inner-column elementor-element elementor-element-f70c9d0 sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"f70c9d0\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-cc96f9f sc_fly_static elementor-widget elementor-widget-text-editor\" data-id=\"cc96f9f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>Implantationskammer \/ Implanter.Module:<\/strong><\/p><p><span style=\"font-weight: 400;\">Vacuum chamber, WaferScanner, WaferChuck, Tilt- und Twist- kinematics, beam apertures, <\/span><span style=\"font-weight: 400;\"><br \/><\/span> <span style=\"font-weight: 400;\">dose measurement (Faraday-Cups), beam calibration, shielding, vacuum system, safety<\/span><\/p><p><a href=\"#implant\">Read more<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-inner-column elementor-element elementor-element-65f2108 sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"65f2108\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-3d6f8ec sc_fly_static elementor-widget elementor-widget-text-editor\" data-id=\"3d6f8ec\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><b>WaferHandling.Module \/ Substrate.Handling<\/b><span style=\"font-weight: 400;\">:<\/span><\/p><p><span style=\"font-weight: 400;\">central robot vacuum chamber, HandlingRobot, gatevalves, LoadLock, <\/span><span style=\"font-weight: 400;\"><br \/><\/span> <span style=\"font-weight: 400;\">Heating, Cooling, Alignment, WaferMagazine, ID.Reader<\/span><\/p><p><a href=\"https:\/\/adenso.solutions\/en\/vac-robotics\/whm-waferhandling-module\/\">Read more<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-inner-column elementor-element elementor-element-c28dead sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"c28dead\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-3fee73d sc_fly_static elementor-widget elementor-widget-text-editor\" data-id=\"3fee73d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><b>BeamLine.Interface<\/b><span style=\"font-weight: 400;\">: <\/span><\/p><p><span style=\"font-weight: 400;\">Interface to customers beam guide and beam shaping system, <\/span><span style=\"font-weight: 400;\"><br \/><\/span> <span style=\"font-weight: 400;\">contains also vacuum- and cryo system, beam\/radiation measurement technology.<\/span><span style=\"font-weight: 400;\"><br \/><\/span> <span style=\"font-weight: 400;\">The BeamLine is usually connected with customers accelerator and ion source system.<\/span><span style=\"font-weight: 400;\"><br \/><\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-82f1ad3 elementor-section-boxed elementor-section-height-default elementor-section-height-default sc_fly_static\" data-id=\"82f1ad3\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-extended\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-901ed63 sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"901ed63\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-77b823c sc_height_small sc_fly_static elementor-widget elementor-widget-spacer\" data-id=\"77b823c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c255628 sc_fly_static elementor-widget elementor-widget-text-editor\" data-id=\"c255628\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><span style=\"font-weight: 400;\">Together, these components form a so-called <b>EndStation for the Ion Implantation of wafers<\/b> (Si, SiC, GaN, \u2026), which is used in the semiconductor industry for doping substrates to produce the desired <b>semiconductor effect<\/b>, <b>optimize the properties<\/b> of semiconductor structures, and much more.<\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fa47dec sc_height_small sc_fly_static elementor-widget elementor-widget-spacer\" data-id=\"fa47dec\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-bd497a6 elementor-section-height-min-height elementor-section-boxed elementor-section-height-default elementor-section-items-middle sc_fly_static\" data-id=\"bd497a6\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t\t<div class=\"elementor-background-overlay\"><\/div>\n\t\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-extended\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-7db6b04 sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"7db6b04\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-f6f246f sc_fly_static elementor-widget elementor-widget-image\" data-id=\"f6f246f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"961\" height=\"820\" src=\"https:\/\/adenso.solutions\/wp-content\/uploads\/2026\/04\/260410_Adenso_EndStations_general-overview-pic_001_opt.jpg\" class=\"attachment-large size-large wp-image-44841\" alt=\"\" srcset=\"https:\/\/adenso.solutions\/wp-content\/uploads\/2026\/04\/260410_Adenso_EndStations_general-overview-pic_001_opt.jpg 961w, https:\/\/adenso.solutions\/wp-content\/uploads\/2026\/04\/260410_Adenso_EndStations_general-overview-pic_001_opt-300x256.jpg 300w, https:\/\/adenso.solutions\/wp-content\/uploads\/2026\/04\/260410_Adenso_EndStations_general-overview-pic_001_opt-768x655.jpg 768w, https:\/\/adenso.solutions\/wp-content\/uploads\/2026\/04\/260410_Adenso_EndStations_general-overview-pic_001_opt-370x316.jpg 370w, https:\/\/adenso.solutions\/wp-content\/uploads\/2026\/04\/260410_Adenso_EndStations_general-overview-pic_001_opt-840x717.jpg 840w, https:\/\/adenso.solutions\/wp-content\/uploads\/2026\/04\/260410_Adenso_EndStations_general-overview-pic_001_opt-410x350.jpg 410w\" sizes=\"(max-width: 961px) 100vw, 961px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-65babd6 elementor-section-boxed elementor-section-height-default elementor-section-height-default sc_fly_static\" data-id=\"65babd6\" data-element_type=\"section\" data-e-type=\"section\" id=\"implant\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-extended\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-dcf1ccf sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"dcf1ccf\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-c8c536e sc_height_huge sc_fly_static elementor-widget elementor-widget-spacer\" data-id=\"c8c536e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-91db39f elementor-reverse-mobile elementor-section-boxed elementor-section-height-default elementor-section-height-default sc_fly_static\" data-id=\"91db39f\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-extended\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-b9cecc2 sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"b9cecc2\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-e3a1d19 elementor-section-content-middle elementor-section-boxed elementor-section-height-default elementor-section-height-default sc_fly_static\" data-id=\"e3a1d19\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-inner-column elementor-element elementor-element-c2c62d3 sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"c2c62d3\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-bfc70d3 up-translateZ-elem no-title sc_fly_static elementor-widget elementor-widget-image\" data-id=\"bfc70d3\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" data-src=\"https:\/\/adenso.solutions\/wp-content\/uploads\/elementor\/thumbs\/Adenso_IMPLANTER_solutions_210-142x_1000-qivi6zhbbdbohvwzybcnq1w10vee2dp4sje33j3fwk.jpg\" title=\"Adenso_IMPLANTER_solutions_210-142x_1000\" alt=\"Adenso_IMPLANTER_solutions_210-142x_1000\" src=\"data:image\/svg+xml;base64,PHN2ZyB3aWR0aD0iMSIgaGVpZ2h0PSIxIiB4bWxucz0iaHR0cDovL3d3dy53My5vcmcvMjAwMC9zdmciPjwvc3ZnPg==\" class=\"lazyload\" style=\"--smush-placeholder-width: 560px; --smush-placeholder-aspect-ratio: 560\/570;\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-inner-column elementor-element elementor-element-dc6e2b4 sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"dc6e2b4\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-e4b9210 sc_layouts_hide_on_mobile sc_fly_static elementor-widget elementor-widget-spacer\" data-id=\"e4b9210\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-55bef6d up-translateZ-elem no-title sc_fly_static elementor-widget elementor-widget-image\" data-id=\"55bef6d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"1000\" height=\"769\" data-src=\"https:\/\/adenso.solutions\/wp-content\/uploads\/2024\/01\/Adenso_IMPLANTER_solutions_110-050x_1000.jpg\" class=\"attachment-large size-large wp-image-43357 lazyload\" alt=\"\" data-srcset=\"https:\/\/adenso.solutions\/wp-content\/uploads\/2024\/01\/Adenso_IMPLANTER_solutions_110-050x_1000.jpg 1000w, https:\/\/adenso.solutions\/wp-content\/uploads\/2024\/01\/Adenso_IMPLANTER_solutions_110-050x_1000-300x231.jpg 300w, https:\/\/adenso.solutions\/wp-content\/uploads\/2024\/01\/Adenso_IMPLANTER_solutions_110-050x_1000-768x591.jpg 768w, https:\/\/adenso.solutions\/wp-content\/uploads\/2024\/01\/Adenso_IMPLANTER_solutions_110-050x_1000-370x285.jpg 370w, https:\/\/adenso.solutions\/wp-content\/uploads\/2024\/01\/Adenso_IMPLANTER_solutions_110-050x_1000-840x646.jpg 840w, https:\/\/adenso.solutions\/wp-content\/uploads\/2024\/01\/Adenso_IMPLANTER_solutions_110-050x_1000-410x315.jpg 410w\" data-sizes=\"auto\" src=\"data:image\/svg+xml;base64,PHN2ZyB3aWR0aD0iMSIgaGVpZ2h0PSIxIiB4bWxucz0iaHR0cDovL3d3dy53My5vcmcvMjAwMC9zdmciPjwvc3ZnPg==\" style=\"--smush-placeholder-width: 1000px; --smush-placeholder-aspect-ratio: 1000\/769;\" data-original-sizes=\"(max-width: 1000px) 100vw, 1000px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-inner-column elementor-element elementor-element-1da2d75 sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"1da2d75\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-c95dc50 sc_fly_static elementor-widget elementor-widget-trx_sc_title\" data-id=\"c95dc50\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"trx_sc_title.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div\t\tclass=\"sc_title sc_title_default\" ><span class=\"sc_item_subtitle sc_title_subtitle sc_item_subtitle_above sc_item_title_style_default\">Module<\/span><h3 class=\"sc_item_title sc_title_title sc_item_title_style_default sc_item_title_tag trx_addons_inline_1077785281\"\n\t\t\t><span class=\"sc_item_title_text\">Implanter.Module<\/span><\/h3><div class=\"sc_item_descr sc_title_descr\"><p>Ion implantation is used in the semiconductor industry to implant (dope) different types of ions with different energies into substrates such as wafers (for doping, creating of planned shortcuts, improve properties, etc.).<br \/>\nThis enables targeted changes to the properties of the base material and\/or the layers that have already been applied. <\/p>\n<\/div><\/div>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7aa0986 sc_fly_static elementor-widget elementor-widget-text-editor\" data-id=\"7aa0986\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><span style=\"font-weight: 400;\">Adenso offers customer-specific <\/span><b>implanter modules<\/b><span style=\"font-weight: 400;\"> (IMP) as part of the modular VAC.ROBOTICS platform &#8211; which enables customers to set up new <\/span><b>EndStations \/ implanter systems<\/b><span style=\"font-weight: 400;\"> and apply and develop new ion implantation technologies quickly and easily.\u00a0<\/span><\/p><p><span style=\"font-weight: 400;\">For new ion implantation processes such as superjunction technologies for SiC (silicon carbide) MOSFETS up to 3.3kV, the <\/span><b>compact implanter modules<\/b><span style=\"font-weight: 400;\"> from Adenso, which have already been proven in industrial series production, are ideally suited for high volume manufacuring, especially in conjunction with the <\/span><b>Substrate Scanner Solutions<\/b><span style=\"font-weight: 400;\"> for precise scanning movements of the SiC substrates\/wafers in the ion beam.<\/span><span style=\"font-weight: 400;\"><br \/><\/span><span style=\"font-weight: 400;\">A key selling point of Adenso\u00b4s implanter modules is that they are available with <\/span><b>DUAL.SCAN kinematics<\/b><span style=\"font-weight: 400;\">, enabling the loading of various substates and\/or achieving maximum throughput.<\/span><span style=\"font-weight: 400;\"><br \/><\/span><span style=\"font-weight: 400;\"><br \/><\/span><span style=\"font-weight: 400;\">eChuck systems (electrostatic substate holders) enable flexible wafer clamping even in cases of significant wafer bow.<\/span><span style=\"font-weight: 400;\"><br \/><\/span><span style=\"font-weight: 400;\">A wide variety of TILT- and TWIST- meachnisms are available as options to optimally align the wafers for the respective implantation processes.<\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-f37ffc2 elementor-section-boxed elementor-section-height-default elementor-section-height-default sc_fly_static\" data-id=\"f37ffc2\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-extended\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-3d563c7 sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"3d563c7\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-b24642f sc_height_huge sc_fly_static elementor-widget elementor-widget-spacer\" data-id=\"b24642f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-6b7de18 scheme_default elementor-section-boxed elementor-section-height-default elementor-section-height-default sc_fly_static\" data-id=\"6b7de18\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-extended\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-4e45613 sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"4e45613\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-3e9fe99 elementor-section-boxed elementor-section-height-default elementor-section-height-default sc_fly_static\" data-id=\"3e9fe99\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-07f4a6d sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"07f4a6d\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-5818120 sc_fly_static elementor-widget elementor-widget-text-editor\" data-id=\"5818120\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><span style=\"font-weight: 400;\">Supplemented with a heating chuck up to 1.000\u00b0C, there is a significant increase in throughput.<\/span><\/p><p><span style=\"font-weight: 400;\">Further options include a wide range of beam controls, calibration equipment and measurement technology. In many cases (e.g. with SiC MOSFETS) these enable the reduction to fewer implantation stages, which means significant cost savings and increased throughput.<\/span><span style=\"font-weight: 400;\"><br \/><\/span><span style=\"font-weight: 400;\">Applications for such silicon-carbide based MOSFETS on SiC superjunction technology are diverse: automotive drivetrains, EV charging, solar energy systems, energy storage, high-power traction inverters etc. <\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-d568a6d sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"d568a6d\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-0fb6997 sc_fly_static elementor-widget elementor-widget-text-editor\" data-id=\"0fb6997\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><span style=\"font-weight: 400;\">The WHM-IMP.Module is designed for substrate dimensions of up to 350mm (round\/square), on which wafer sizes of 200\/150\/100\/75\/50\/25mm also can be processed.<\/span> <span style=\"font-weight: 400;\"><br \/><\/span><span style=\"font-weight: 400;\"><br \/><\/span><span style=\"font-weight: 400;\">Direct substrate handling as well as carrier solutions are available for all substrate sizes and dimensions (round, rectangular, special)<\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0f26131 elementor-icon-list--layout-traditional elementor-list-item-link-full_width sc_fly_static elementor-widget elementor-widget-icon-list\" data-id=\"0f26131\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg xmlns=\"http:\/\/www.w3.org\/2000\/svg\" width=\"187\" height=\"178\" viewBox=\"0 0 187 178\"><path d=\"M 163.500 12.891 C 158.550 16.152, 151.357 21.550, 147.516 24.887 L 140.532 30.954 137.168 24.966 L 133.805 18.977 93.796 19.239 L 53.787 19.500 44.837 35 C 39.914 43.525, 30.915 59.138, 24.838 69.696 L 13.790 88.893 33.645 123.433 L 53.500 157.974 93.953 157.737 L 134.407 157.500 153.703 124.138 C 164.316 105.789, 173 89.902, 173 88.834 C 173 87.765, 167.150 76.815, 160 64.500 C 152.850 52.185, 147 41.594, 147 40.965 C 147 39.784, 160.122 26.692, 170.250 17.767 C 173.412 14.980, 176 12.367, 176 11.961 C 176 11.554, 175.213 10.263, 174.250 9.092 L 172.500 6.962 163.500 12.891 M 37.651 55.332 C 27.393 73.127, 19.019 88.320, 19.043 89.093 C 19.067 89.867, 27.304 104.675, 37.348 122 L 55.609 153.500 93.872 153.500 L 132.134 153.500 150.567 121.641 C 160.705 104.119, 169 89.380, 169 88.888 C 169 88.173, 144.526 45.209, 143.562 44.232 C 143.128 43.793, 124.150 68.235, 117.166 78.227 C 109.276 89.516, 101.093 102.879, 96.565 111.871 C 93.582 117.795, 92.134 119.349, 84.070 125.286 C 79.054 128.979, 74.569 132, 74.104 132 C 73.640 132, 72.039 128.563, 70.548 124.361 C 63.580 104.734, 54.093 89.168, 46.800 85.396 L 43.829 83.860 47.664 80.474 C 52.241 76.434, 56.840 74.063, 61.591 73.292 C 64.732 72.782, 65.499 73.165, 69.290 77.139 C 71.605 79.567, 75.451 85.513, 77.836 90.352 L 82.171 99.150 89.526 88.325 C 100.062 72.819, 108.642 62.440, 123.888 46.755 L 137.277 32.982 134.346 28.241 L 131.415 23.500 93.858 23.238 L 56.301 22.976 37.651 55.332\" stroke=\"none\" fill=\"#f4f5f7\" fill-rule=\"evenodd\"><\/path><path d=\"M 44.164 16.750 C 9.572 76.243, 3.874 86.620, 4.212 89.500 C 4.406 91.150, 14.384 109.487, 26.386 130.250 L 48.208 168 93.882 168 L 139.556 168 161.778 129.549 C 174 108.400, 184 90.113, 184 88.910 C 184 87.227, 159.172 42.669, 153.961 35 C 153.109 33.745, 152.456 34.066, 149.971 36.962 C 148.337 38.866, 147 40.803, 147 41.267 C 147 41.730, 152.850 52.185, 160 64.500 C 167.150 76.815, 173 87.765, 173 88.834 C 173 89.902, 164.316 105.789, 153.703 124.138 L 134.407 157.500 93.953 157.737 L 53.500 157.974 33.645 123.433 L 13.790 88.893 24.838 69.696 C 30.915 59.138, 39.914 43.525, 44.837 35 L 53.787 19.500 93.796 19.239 L 133.805 18.977 137.157 24.945 L 140.509 30.912 144.244 27.706 L 147.980 24.500 143.913 17.250 L 139.847 10 93.968 10 L 48.088 10 44.164 16.750 M 37.651 55.332 C 27.393 73.127, 19.019 88.320, 19.043 89.093 C 19.067 89.867, 27.304 104.675, 37.348 122 L 55.609 153.500 93.872 153.500 L 132.134 153.500 150.567 121.641 C 160.705 104.119, 169 89.380, 169 88.888 C 169 88.173, 144.526 45.209, 143.562 44.232 C 143.128 43.793, 124.150 68.235, 117.166 78.227 C 109.276 89.516, 101.093 102.879, 96.565 111.871 C 93.582 117.795, 92.134 119.349, 84.070 125.286 C 79.054 128.979, 74.569 132, 74.104 132 C 73.640 132, 72.039 128.563, 70.548 124.361 C 63.580 104.734, 54.093 89.168, 46.800 85.396 L 43.829 83.860 47.664 80.474 C 52.241 76.434, 56.840 74.063, 61.591 73.292 C 64.732 72.782, 65.499 73.165, 69.290 77.139 C 71.605 79.567, 75.451 85.513, 77.836 90.352 L 82.171 99.150 89.526 88.325 C 100.062 72.819, 108.642 62.440, 123.888 46.755 L 137.277 32.982 134.346 28.241 L 131.415 23.500 93.858 23.238 L 56.301 22.976 37.651 55.332\" stroke=\"none\" fill=\"#1e3675\" fill-rule=\"evenodd\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">flexible, customer-specific configuration, based on industrial-prooved solutions <\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg xmlns=\"http:\/\/www.w3.org\/2000\/svg\" width=\"187\" height=\"178\" viewBox=\"0 0 187 178\"><path d=\"M 163.500 12.891 C 158.550 16.152, 151.357 21.550, 147.516 24.887 L 140.532 30.954 137.168 24.966 L 133.805 18.977 93.796 19.239 L 53.787 19.500 44.837 35 C 39.914 43.525, 30.915 59.138, 24.838 69.696 L 13.790 88.893 33.645 123.433 L 53.500 157.974 93.953 157.737 L 134.407 157.500 153.703 124.138 C 164.316 105.789, 173 89.902, 173 88.834 C 173 87.765, 167.150 76.815, 160 64.500 C 152.850 52.185, 147 41.594, 147 40.965 C 147 39.784, 160.122 26.692, 170.250 17.767 C 173.412 14.980, 176 12.367, 176 11.961 C 176 11.554, 175.213 10.263, 174.250 9.092 L 172.500 6.962 163.500 12.891 M 37.651 55.332 C 27.393 73.127, 19.019 88.320, 19.043 89.093 C 19.067 89.867, 27.304 104.675, 37.348 122 L 55.609 153.500 93.872 153.500 L 132.134 153.500 150.567 121.641 C 160.705 104.119, 169 89.380, 169 88.888 C 169 88.173, 144.526 45.209, 143.562 44.232 C 143.128 43.793, 124.150 68.235, 117.166 78.227 C 109.276 89.516, 101.093 102.879, 96.565 111.871 C 93.582 117.795, 92.134 119.349, 84.070 125.286 C 79.054 128.979, 74.569 132, 74.104 132 C 73.640 132, 72.039 128.563, 70.548 124.361 C 63.580 104.734, 54.093 89.168, 46.800 85.396 L 43.829 83.860 47.664 80.474 C 52.241 76.434, 56.840 74.063, 61.591 73.292 C 64.732 72.782, 65.499 73.165, 69.290 77.139 C 71.605 79.567, 75.451 85.513, 77.836 90.352 L 82.171 99.150 89.526 88.325 C 100.062 72.819, 108.642 62.440, 123.888 46.755 L 137.277 32.982 134.346 28.241 L 131.415 23.500 93.858 23.238 L 56.301 22.976 37.651 55.332\" stroke=\"none\" fill=\"#f4f5f7\" fill-rule=\"evenodd\"><\/path><path d=\"M 44.164 16.750 C 9.572 76.243, 3.874 86.620, 4.212 89.500 C 4.406 91.150, 14.384 109.487, 26.386 130.250 L 48.208 168 93.882 168 L 139.556 168 161.778 129.549 C 174 108.400, 184 90.113, 184 88.910 C 184 87.227, 159.172 42.669, 153.961 35 C 153.109 33.745, 152.456 34.066, 149.971 36.962 C 148.337 38.866, 147 40.803, 147 41.267 C 147 41.730, 152.850 52.185, 160 64.500 C 167.150 76.815, 173 87.765, 173 88.834 C 173 89.902, 164.316 105.789, 153.703 124.138 L 134.407 157.500 93.953 157.737 L 53.500 157.974 33.645 123.433 L 13.790 88.893 24.838 69.696 C 30.915 59.138, 39.914 43.525, 44.837 35 L 53.787 19.500 93.796 19.239 L 133.805 18.977 137.157 24.945 L 140.509 30.912 144.244 27.706 L 147.980 24.500 143.913 17.250 L 139.847 10 93.968 10 L 48.088 10 44.164 16.750 M 37.651 55.332 C 27.393 73.127, 19.019 88.320, 19.043 89.093 C 19.067 89.867, 27.304 104.675, 37.348 122 L 55.609 153.500 93.872 153.500 L 132.134 153.500 150.567 121.641 C 160.705 104.119, 169 89.380, 169 88.888 C 169 88.173, 144.526 45.209, 143.562 44.232 C 143.128 43.793, 124.150 68.235, 117.166 78.227 C 109.276 89.516, 101.093 102.879, 96.565 111.871 C 93.582 117.795, 92.134 119.349, 84.070 125.286 C 79.054 128.979, 74.569 132, 74.104 132 C 73.640 132, 72.039 128.563, 70.548 124.361 C 63.580 104.734, 54.093 89.168, 46.800 85.396 L 43.829 83.860 47.664 80.474 C 52.241 76.434, 56.840 74.063, 61.591 73.292 C 64.732 72.782, 65.499 73.165, 69.290 77.139 C 71.605 79.567, 75.451 85.513, 77.836 90.352 L 82.171 99.150 89.526 88.325 C 100.062 72.819, 108.642 62.440, 123.888 46.755 L 137.277 32.982 134.346 28.241 L 131.415 23.500 93.858 23.238 L 56.301 22.976 37.651 55.332\" stroke=\"none\" fill=\"#1e3675\" fill-rule=\"evenodd\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">fast commissioning based on modular hardware and software concept <\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/adenso.solutions\/en\/vac-robotics\/software-solutions\/#adcontrol\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg xmlns=\"http:\/\/www.w3.org\/2000\/svg\" width=\"187\" height=\"178\" viewBox=\"0 0 187 178\"><path d=\"M 163.500 12.891 C 158.550 16.152, 151.357 21.550, 147.516 24.887 L 140.532 30.954 137.168 24.966 L 133.805 18.977 93.796 19.239 L 53.787 19.500 44.837 35 C 39.914 43.525, 30.915 59.138, 24.838 69.696 L 13.790 88.893 33.645 123.433 L 53.500 157.974 93.953 157.737 L 134.407 157.500 153.703 124.138 C 164.316 105.789, 173 89.902, 173 88.834 C 173 87.765, 167.150 76.815, 160 64.500 C 152.850 52.185, 147 41.594, 147 40.965 C 147 39.784, 160.122 26.692, 170.250 17.767 C 173.412 14.980, 176 12.367, 176 11.961 C 176 11.554, 175.213 10.263, 174.250 9.092 L 172.500 6.962 163.500 12.891 M 37.651 55.332 C 27.393 73.127, 19.019 88.320, 19.043 89.093 C 19.067 89.867, 27.304 104.675, 37.348 122 L 55.609 153.500 93.872 153.500 L 132.134 153.500 150.567 121.641 C 160.705 104.119, 169 89.380, 169 88.888 C 169 88.173, 144.526 45.209, 143.562 44.232 C 143.128 43.793, 124.150 68.235, 117.166 78.227 C 109.276 89.516, 101.093 102.879, 96.565 111.871 C 93.582 117.795, 92.134 119.349, 84.070 125.286 C 79.054 128.979, 74.569 132, 74.104 132 C 73.640 132, 72.039 128.563, 70.548 124.361 C 63.580 104.734, 54.093 89.168, 46.800 85.396 L 43.829 83.860 47.664 80.474 C 52.241 76.434, 56.840 74.063, 61.591 73.292 C 64.732 72.782, 65.499 73.165, 69.290 77.139 C 71.605 79.567, 75.451 85.513, 77.836 90.352 L 82.171 99.150 89.526 88.325 C 100.062 72.819, 108.642 62.440, 123.888 46.755 L 137.277 32.982 134.346 28.241 L 131.415 23.500 93.858 23.238 L 56.301 22.976 37.651 55.332\" stroke=\"none\" fill=\"#f4f5f7\" fill-rule=\"evenodd\"><\/path><path d=\"M 44.164 16.750 C 9.572 76.243, 3.874 86.620, 4.212 89.500 C 4.406 91.150, 14.384 109.487, 26.386 130.250 L 48.208 168 93.882 168 L 139.556 168 161.778 129.549 C 174 108.400, 184 90.113, 184 88.910 C 184 87.227, 159.172 42.669, 153.961 35 C 153.109 33.745, 152.456 34.066, 149.971 36.962 C 148.337 38.866, 147 40.803, 147 41.267 C 147 41.730, 152.850 52.185, 160 64.500 C 167.150 76.815, 173 87.765, 173 88.834 C 173 89.902, 164.316 105.789, 153.703 124.138 L 134.407 157.500 93.953 157.737 L 53.500 157.974 33.645 123.433 L 13.790 88.893 24.838 69.696 C 30.915 59.138, 39.914 43.525, 44.837 35 L 53.787 19.500 93.796 19.239 L 133.805 18.977 137.157 24.945 L 140.509 30.912 144.244 27.706 L 147.980 24.500 143.913 17.250 L 139.847 10 93.968 10 L 48.088 10 44.164 16.750 M 37.651 55.332 C 27.393 73.127, 19.019 88.320, 19.043 89.093 C 19.067 89.867, 27.304 104.675, 37.348 122 L 55.609 153.500 93.872 153.500 L 132.134 153.500 150.567 121.641 C 160.705 104.119, 169 89.380, 169 88.888 C 169 88.173, 144.526 45.209, 143.562 44.232 C 143.128 43.793, 124.150 68.235, 117.166 78.227 C 109.276 89.516, 101.093 102.879, 96.565 111.871 C 93.582 117.795, 92.134 119.349, 84.070 125.286 C 79.054 128.979, 74.569 132, 74.104 132 C 73.640 132, 72.039 128.563, 70.548 124.361 C 63.580 104.734, 54.093 89.168, 46.800 85.396 L 43.829 83.860 47.664 80.474 C 52.241 76.434, 56.840 74.063, 61.591 73.292 C 64.732 72.782, 65.499 73.165, 69.290 77.139 C 71.605 79.567, 75.451 85.513, 77.836 90.352 L 82.171 99.150 89.526 88.325 C 100.062 72.819, 108.642 62.440, 123.888 46.755 L 137.277 32.982 134.346 28.241 L 131.415 23.500 93.858 23.238 L 56.301 22.976 37.651 55.332\" stroke=\"none\" fill=\"#1e3675\" fill-rule=\"evenodd\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">integration of customers ion implantation technologies and measurement equipment <\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-2c3d676 elementor-section-boxed elementor-section-height-default elementor-section-height-default sc_fly_static\" data-id=\"2c3d676\" data-element_type=\"section\" data-e-type=\"section\" id=\"sss\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-extended\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-47d17ec sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"47d17ec\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-dd40b36 sc_height_huge sc_fly_static elementor-widget elementor-widget-spacer\" data-id=\"dd40b36\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-7c1b310 scheme_default elementor-section-boxed elementor-section-height-default elementor-section-height-default sc_fly_static\" data-id=\"7c1b310\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-extended\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-5e42f3e sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"5e42f3e\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-3ca4aa3 elementor-section-boxed elementor-section-height-default elementor-section-height-default sc_fly_static\" data-id=\"3ca4aa3\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-67af4a0 sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"67af4a0\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-a3474b0 sc_fly_static elementor-widget elementor-widget-trx_sc_title\" data-id=\"a3474b0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"trx_sc_title.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div\t\tclass=\"sc_title sc_title_default\" ><span class=\"sc_item_subtitle sc_title_subtitle sc_item_subtitle_above sc_item_title_style_default\">Module<\/span><h3 class=\"sc_item_title sc_title_title sc_item_title_style_default sc_item_title_tag trx_addons_inline_648828454\"\n\t\t\t><span class=\"sc_item_title_text\">SSS SubstrateScanner.Solutions<\/span><\/h3><\/div>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9b53d9b sc_fly_static elementor-widget elementor-widget-spacer\" data-id=\"9b53d9b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7eeb549 sc_fly_static elementor-widget elementor-widget-text-editor\" data-id=\"7eeb549\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>The following special features are particularly valued by Adenso.Implanting customers<\/strong><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-042eb54 elementor-icon-list--layout-traditional elementor-list-item-link-full_width sc_fly_static elementor-widget elementor-widget-icon-list\" data-id=\"042eb54\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg xmlns=\"http:\/\/www.w3.org\/2000\/svg\" width=\"187\" height=\"178\" viewBox=\"0 0 187 178\"><path d=\"M 163.500 12.891 C 158.550 16.152, 151.357 21.550, 147.516 24.887 L 140.532 30.954 137.168 24.966 L 133.805 18.977 93.796 19.239 L 53.787 19.500 44.837 35 C 39.914 43.525, 30.915 59.138, 24.838 69.696 L 13.790 88.893 33.645 123.433 L 53.500 157.974 93.953 157.737 L 134.407 157.500 153.703 124.138 C 164.316 105.789, 173 89.902, 173 88.834 C 173 87.765, 167.150 76.815, 160 64.500 C 152.850 52.185, 147 41.594, 147 40.965 C 147 39.784, 160.122 26.692, 170.250 17.767 C 173.412 14.980, 176 12.367, 176 11.961 C 176 11.554, 175.213 10.263, 174.250 9.092 L 172.500 6.962 163.500 12.891 M 37.651 55.332 C 27.393 73.127, 19.019 88.320, 19.043 89.093 C 19.067 89.867, 27.304 104.675, 37.348 122 L 55.609 153.500 93.872 153.500 L 132.134 153.500 150.567 121.641 C 160.705 104.119, 169 89.380, 169 88.888 C 169 88.173, 144.526 45.209, 143.562 44.232 C 143.128 43.793, 124.150 68.235, 117.166 78.227 C 109.276 89.516, 101.093 102.879, 96.565 111.871 C 93.582 117.795, 92.134 119.349, 84.070 125.286 C 79.054 128.979, 74.569 132, 74.104 132 C 73.640 132, 72.039 128.563, 70.548 124.361 C 63.580 104.734, 54.093 89.168, 46.800 85.396 L 43.829 83.860 47.664 80.474 C 52.241 76.434, 56.840 74.063, 61.591 73.292 C 64.732 72.782, 65.499 73.165, 69.290 77.139 C 71.605 79.567, 75.451 85.513, 77.836 90.352 L 82.171 99.150 89.526 88.325 C 100.062 72.819, 108.642 62.440, 123.888 46.755 L 137.277 32.982 134.346 28.241 L 131.415 23.500 93.858 23.238 L 56.301 22.976 37.651 55.332\" stroke=\"none\" fill=\"#f4f5f7\" fill-rule=\"evenodd\"><\/path><path d=\"M 44.164 16.750 C 9.572 76.243, 3.874 86.620, 4.212 89.500 C 4.406 91.150, 14.384 109.487, 26.386 130.250 L 48.208 168 93.882 168 L 139.556 168 161.778 129.549 C 174 108.400, 184 90.113, 184 88.910 C 184 87.227, 159.172 42.669, 153.961 35 C 153.109 33.745, 152.456 34.066, 149.971 36.962 C 148.337 38.866, 147 40.803, 147 41.267 C 147 41.730, 152.850 52.185, 160 64.500 C 167.150 76.815, 173 87.765, 173 88.834 C 173 89.902, 164.316 105.789, 153.703 124.138 L 134.407 157.500 93.953 157.737 L 53.500 157.974 33.645 123.433 L 13.790 88.893 24.838 69.696 C 30.915 59.138, 39.914 43.525, 44.837 35 L 53.787 19.500 93.796 19.239 L 133.805 18.977 137.157 24.945 L 140.509 30.912 144.244 27.706 L 147.980 24.500 143.913 17.250 L 139.847 10 93.968 10 L 48.088 10 44.164 16.750 M 37.651 55.332 C 27.393 73.127, 19.019 88.320, 19.043 89.093 C 19.067 89.867, 27.304 104.675, 37.348 122 L 55.609 153.500 93.872 153.500 L 132.134 153.500 150.567 121.641 C 160.705 104.119, 169 89.380, 169 88.888 C 169 88.173, 144.526 45.209, 143.562 44.232 C 143.128 43.793, 124.150 68.235, 117.166 78.227 C 109.276 89.516, 101.093 102.879, 96.565 111.871 C 93.582 117.795, 92.134 119.349, 84.070 125.286 C 79.054 128.979, 74.569 132, 74.104 132 C 73.640 132, 72.039 128.563, 70.548 124.361 C 63.580 104.734, 54.093 89.168, 46.800 85.396 L 43.829 83.860 47.664 80.474 C 52.241 76.434, 56.840 74.063, 61.591 73.292 C 64.732 72.782, 65.499 73.165, 69.290 77.139 C 71.605 79.567, 75.451 85.513, 77.836 90.352 L 82.171 99.150 89.526 88.325 C 100.062 72.819, 108.642 62.440, 123.888 46.755 L 137.277 32.982 134.346 28.241 L 131.415 23.500 93.858 23.238 L 56.301 22.976 37.651 55.332\" stroke=\"none\" fill=\"#1e3675\" fill-rule=\"evenodd\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">vertical.scanner \u2013 for fast and high precise substrate movements, in case the ion beam can only be formed in one dimension<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg xmlns=\"http:\/\/www.w3.org\/2000\/svg\" width=\"187\" height=\"178\" viewBox=\"0 0 187 178\"><path d=\"M 163.500 12.891 C 158.550 16.152, 151.357 21.550, 147.516 24.887 L 140.532 30.954 137.168 24.966 L 133.805 18.977 93.796 19.239 L 53.787 19.500 44.837 35 C 39.914 43.525, 30.915 59.138, 24.838 69.696 L 13.790 88.893 33.645 123.433 L 53.500 157.974 93.953 157.737 L 134.407 157.500 153.703 124.138 C 164.316 105.789, 173 89.902, 173 88.834 C 173 87.765, 167.150 76.815, 160 64.500 C 152.850 52.185, 147 41.594, 147 40.965 C 147 39.784, 160.122 26.692, 170.250 17.767 C 173.412 14.980, 176 12.367, 176 11.961 C 176 11.554, 175.213 10.263, 174.250 9.092 L 172.500 6.962 163.500 12.891 M 37.651 55.332 C 27.393 73.127, 19.019 88.320, 19.043 89.093 C 19.067 89.867, 27.304 104.675, 37.348 122 L 55.609 153.500 93.872 153.500 L 132.134 153.500 150.567 121.641 C 160.705 104.119, 169 89.380, 169 88.888 C 169 88.173, 144.526 45.209, 143.562 44.232 C 143.128 43.793, 124.150 68.235, 117.166 78.227 C 109.276 89.516, 101.093 102.879, 96.565 111.871 C 93.582 117.795, 92.134 119.349, 84.070 125.286 C 79.054 128.979, 74.569 132, 74.104 132 C 73.640 132, 72.039 128.563, 70.548 124.361 C 63.580 104.734, 54.093 89.168, 46.800 85.396 L 43.829 83.860 47.664 80.474 C 52.241 76.434, 56.840 74.063, 61.591 73.292 C 64.732 72.782, 65.499 73.165, 69.290 77.139 C 71.605 79.567, 75.451 85.513, 77.836 90.352 L 82.171 99.150 89.526 88.325 C 100.062 72.819, 108.642 62.440, 123.888 46.755 L 137.277 32.982 134.346 28.241 L 131.415 23.500 93.858 23.238 L 56.301 22.976 37.651 55.332\" stroke=\"none\" fill=\"#f4f5f7\" fill-rule=\"evenodd\"><\/path><path d=\"M 44.164 16.750 C 9.572 76.243, 3.874 86.620, 4.212 89.500 C 4.406 91.150, 14.384 109.487, 26.386 130.250 L 48.208 168 93.882 168 L 139.556 168 161.778 129.549 C 174 108.400, 184 90.113, 184 88.910 C 184 87.227, 159.172 42.669, 153.961 35 C 153.109 33.745, 152.456 34.066, 149.971 36.962 C 148.337 38.866, 147 40.803, 147 41.267 C 147 41.730, 152.850 52.185, 160 64.500 C 167.150 76.815, 173 87.765, 173 88.834 C 173 89.902, 164.316 105.789, 153.703 124.138 L 134.407 157.500 93.953 157.737 L 53.500 157.974 33.645 123.433 L 13.790 88.893 24.838 69.696 C 30.915 59.138, 39.914 43.525, 44.837 35 L 53.787 19.500 93.796 19.239 L 133.805 18.977 137.157 24.945 L 140.509 30.912 144.244 27.706 L 147.980 24.500 143.913 17.250 L 139.847 10 93.968 10 L 48.088 10 44.164 16.750 M 37.651 55.332 C 27.393 73.127, 19.019 88.320, 19.043 89.093 C 19.067 89.867, 27.304 104.675, 37.348 122 L 55.609 153.500 93.872 153.500 L 132.134 153.500 150.567 121.641 C 160.705 104.119, 169 89.380, 169 88.888 C 169 88.173, 144.526 45.209, 143.562 44.232 C 143.128 43.793, 124.150 68.235, 117.166 78.227 C 109.276 89.516, 101.093 102.879, 96.565 111.871 C 93.582 117.795, 92.134 119.349, 84.070 125.286 C 79.054 128.979, 74.569 132, 74.104 132 C 73.640 132, 72.039 128.563, 70.548 124.361 C 63.580 104.734, 54.093 89.168, 46.800 85.396 L 43.829 83.860 47.664 80.474 C 52.241 76.434, 56.840 74.063, 61.591 73.292 C 64.732 72.782, 65.499 73.165, 69.290 77.139 C 71.605 79.567, 75.451 85.513, 77.836 90.352 L 82.171 99.150 89.526 88.325 C 100.062 72.819, 108.642 62.440, 123.888 46.755 L 137.277 32.982 134.346 28.241 L 131.415 23.500 93.858 23.238 L 56.301 22.976 37.651 55.332\" stroke=\"none\" fill=\"#1e3675\" fill-rule=\"evenodd\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">DUAL.SCAN Solution \u2013 comes with two scanning modules \u2013 for highest thruput and\/or filter\/substrate combinations<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/adenso.solutions\/en\/vac-robotics\/software-solutions\/#adcontrol\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg xmlns=\"http:\/\/www.w3.org\/2000\/svg\" width=\"187\" height=\"178\" viewBox=\"0 0 187 178\"><path d=\"M 163.500 12.891 C 158.550 16.152, 151.357 21.550, 147.516 24.887 L 140.532 30.954 137.168 24.966 L 133.805 18.977 93.796 19.239 L 53.787 19.500 44.837 35 C 39.914 43.525, 30.915 59.138, 24.838 69.696 L 13.790 88.893 33.645 123.433 L 53.500 157.974 93.953 157.737 L 134.407 157.500 153.703 124.138 C 164.316 105.789, 173 89.902, 173 88.834 C 173 87.765, 167.150 76.815, 160 64.500 C 152.850 52.185, 147 41.594, 147 40.965 C 147 39.784, 160.122 26.692, 170.250 17.767 C 173.412 14.980, 176 12.367, 176 11.961 C 176 11.554, 175.213 10.263, 174.250 9.092 L 172.500 6.962 163.500 12.891 M 37.651 55.332 C 27.393 73.127, 19.019 88.320, 19.043 89.093 C 19.067 89.867, 27.304 104.675, 37.348 122 L 55.609 153.500 93.872 153.500 L 132.134 153.500 150.567 121.641 C 160.705 104.119, 169 89.380, 169 88.888 C 169 88.173, 144.526 45.209, 143.562 44.232 C 143.128 43.793, 124.150 68.235, 117.166 78.227 C 109.276 89.516, 101.093 102.879, 96.565 111.871 C 93.582 117.795, 92.134 119.349, 84.070 125.286 C 79.054 128.979, 74.569 132, 74.104 132 C 73.640 132, 72.039 128.563, 70.548 124.361 C 63.580 104.734, 54.093 89.168, 46.800 85.396 L 43.829 83.860 47.664 80.474 C 52.241 76.434, 56.840 74.063, 61.591 73.292 C 64.732 72.782, 65.499 73.165, 69.290 77.139 C 71.605 79.567, 75.451 85.513, 77.836 90.352 L 82.171 99.150 89.526 88.325 C 100.062 72.819, 108.642 62.440, 123.888 46.755 L 137.277 32.982 134.346 28.241 L 131.415 23.500 93.858 23.238 L 56.301 22.976 37.651 55.332\" stroke=\"none\" fill=\"#f4f5f7\" fill-rule=\"evenodd\"><\/path><path d=\"M 44.164 16.750 C 9.572 76.243, 3.874 86.620, 4.212 89.500 C 4.406 91.150, 14.384 109.487, 26.386 130.250 L 48.208 168 93.882 168 L 139.556 168 161.778 129.549 C 174 108.400, 184 90.113, 184 88.910 C 184 87.227, 159.172 42.669, 153.961 35 C 153.109 33.745, 152.456 34.066, 149.971 36.962 C 148.337 38.866, 147 40.803, 147 41.267 C 147 41.730, 152.850 52.185, 160 64.500 C 167.150 76.815, 173 87.765, 173 88.834 C 173 89.902, 164.316 105.789, 153.703 124.138 L 134.407 157.500 93.953 157.737 L 53.500 157.974 33.645 123.433 L 13.790 88.893 24.838 69.696 C 30.915 59.138, 39.914 43.525, 44.837 35 L 53.787 19.500 93.796 19.239 L 133.805 18.977 137.157 24.945 L 140.509 30.912 144.244 27.706 L 147.980 24.500 143.913 17.250 L 139.847 10 93.968 10 L 48.088 10 44.164 16.750 M 37.651 55.332 C 27.393 73.127, 19.019 88.320, 19.043 89.093 C 19.067 89.867, 27.304 104.675, 37.348 122 L 55.609 153.500 93.872 153.500 L 132.134 153.500 150.567 121.641 C 160.705 104.119, 169 89.380, 169 88.888 C 169 88.173, 144.526 45.209, 143.562 44.232 C 143.128 43.793, 124.150 68.235, 117.166 78.227 C 109.276 89.516, 101.093 102.879, 96.565 111.871 C 93.582 117.795, 92.134 119.349, 84.070 125.286 C 79.054 128.979, 74.569 132, 74.104 132 C 73.640 132, 72.039 128.563, 70.548 124.361 C 63.580 104.734, 54.093 89.168, 46.800 85.396 L 43.829 83.860 47.664 80.474 C 52.241 76.434, 56.840 74.063, 61.591 73.292 C 64.732 72.782, 65.499 73.165, 69.290 77.139 C 71.605 79.567, 75.451 85.513, 77.836 90.352 L 82.171 99.150 89.526 88.325 C 100.062 72.819, 108.642 62.440, 123.888 46.755 L 137.277 32.982 134.346 28.241 L 131.415 23.500 93.858 23.238 L 56.301 22.976 37.651 55.332\" stroke=\"none\" fill=\"#1e3675\" fill-rule=\"evenodd\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">active-\/passive-substratt \u2013 beam filter technology<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/adenso.solutions\/en\/vac-robotics\/software-solutions\/#adcontrol\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg xmlns=\"http:\/\/www.w3.org\/2000\/svg\" width=\"187\" height=\"178\" viewBox=\"0 0 187 178\"><path d=\"M 163.500 12.891 C 158.550 16.152, 151.357 21.550, 147.516 24.887 L 140.532 30.954 137.168 24.966 L 133.805 18.977 93.796 19.239 L 53.787 19.500 44.837 35 C 39.914 43.525, 30.915 59.138, 24.838 69.696 L 13.790 88.893 33.645 123.433 L 53.500 157.974 93.953 157.737 L 134.407 157.500 153.703 124.138 C 164.316 105.789, 173 89.902, 173 88.834 C 173 87.765, 167.150 76.815, 160 64.500 C 152.850 52.185, 147 41.594, 147 40.965 C 147 39.784, 160.122 26.692, 170.250 17.767 C 173.412 14.980, 176 12.367, 176 11.961 C 176 11.554, 175.213 10.263, 174.250 9.092 L 172.500 6.962 163.500 12.891 M 37.651 55.332 C 27.393 73.127, 19.019 88.320, 19.043 89.093 C 19.067 89.867, 27.304 104.675, 37.348 122 L 55.609 153.500 93.872 153.500 L 132.134 153.500 150.567 121.641 C 160.705 104.119, 169 89.380, 169 88.888 C 169 88.173, 144.526 45.209, 143.562 44.232 C 143.128 43.793, 124.150 68.235, 117.166 78.227 C 109.276 89.516, 101.093 102.879, 96.565 111.871 C 93.582 117.795, 92.134 119.349, 84.070 125.286 C 79.054 128.979, 74.569 132, 74.104 132 C 73.640 132, 72.039 128.563, 70.548 124.361 C 63.580 104.734, 54.093 89.168, 46.800 85.396 L 43.829 83.860 47.664 80.474 C 52.241 76.434, 56.840 74.063, 61.591 73.292 C 64.732 72.782, 65.499 73.165, 69.290 77.139 C 71.605 79.567, 75.451 85.513, 77.836 90.352 L 82.171 99.150 89.526 88.325 C 100.062 72.819, 108.642 62.440, 123.888 46.755 L 137.277 32.982 134.346 28.241 L 131.415 23.500 93.858 23.238 L 56.301 22.976 37.651 55.332\" stroke=\"none\" fill=\"#f4f5f7\" fill-rule=\"evenodd\"><\/path><path d=\"M 44.164 16.750 C 9.572 76.243, 3.874 86.620, 4.212 89.500 C 4.406 91.150, 14.384 109.487, 26.386 130.250 L 48.208 168 93.882 168 L 139.556 168 161.778 129.549 C 174 108.400, 184 90.113, 184 88.910 C 184 87.227, 159.172 42.669, 153.961 35 C 153.109 33.745, 152.456 34.066, 149.971 36.962 C 148.337 38.866, 147 40.803, 147 41.267 C 147 41.730, 152.850 52.185, 160 64.500 C 167.150 76.815, 173 87.765, 173 88.834 C 173 89.902, 164.316 105.789, 153.703 124.138 L 134.407 157.500 93.953 157.737 L 53.500 157.974 33.645 123.433 L 13.790 88.893 24.838 69.696 C 30.915 59.138, 39.914 43.525, 44.837 35 L 53.787 19.500 93.796 19.239 L 133.805 18.977 137.157 24.945 L 140.509 30.912 144.244 27.706 L 147.980 24.500 143.913 17.250 L 139.847 10 93.968 10 L 48.088 10 44.164 16.750 M 37.651 55.332 C 27.393 73.127, 19.019 88.320, 19.043 89.093 C 19.067 89.867, 27.304 104.675, 37.348 122 L 55.609 153.500 93.872 153.500 L 132.134 153.500 150.567 121.641 C 160.705 104.119, 169 89.380, 169 88.888 C 169 88.173, 144.526 45.209, 143.562 44.232 C 143.128 43.793, 124.150 68.235, 117.166 78.227 C 109.276 89.516, 101.093 102.879, 96.565 111.871 C 93.582 117.795, 92.134 119.349, 84.070 125.286 C 79.054 128.979, 74.569 132, 74.104 132 C 73.640 132, 72.039 128.563, 70.548 124.361 C 63.580 104.734, 54.093 89.168, 46.800 85.396 L 43.829 83.860 47.664 80.474 C 52.241 76.434, 56.840 74.063, 61.591 73.292 C 64.732 72.782, 65.499 73.165, 69.290 77.139 C 71.605 79.567, 75.451 85.513, 77.836 90.352 L 82.171 99.150 89.526 88.325 C 100.062 72.819, 108.642 62.440, 123.888 46.755 L 137.277 32.982 134.346 28.241 L 131.415 23.500 93.858 23.238 L 56.301 22.976 37.651 55.332\" stroke=\"none\" fill=\"#1e3675\" fill-rule=\"evenodd\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">heat\/cool \u2013 chuck systems available (up to 1.000\u00b0C)<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-4291fb8 sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"4291fb8\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-5a30049 up-translateZ-elem no-title sc_fly_static elementor-widget elementor-widget-image\" data-id=\"5a30049\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"2000\" height=\"1125\" data-src=\"https:\/\/adenso.solutions\/wp-content\/uploads\/2024\/06\/240624-431-HOTCHUCK-001x.jpg\" class=\"attachment-full size-full wp-image-43956 lazyload\" alt=\"\" data-srcset=\"https:\/\/adenso.solutions\/wp-content\/uploads\/2024\/06\/240624-431-HOTCHUCK-001x.jpg 2000w, https:\/\/adenso.solutions\/wp-content\/uploads\/2024\/06\/240624-431-HOTCHUCK-001x-300x169.jpg 300w, https:\/\/adenso.solutions\/wp-content\/uploads\/2024\/06\/240624-431-HOTCHUCK-001x-1024x576.jpg 1024w, https:\/\/adenso.solutions\/wp-content\/uploads\/2024\/06\/240624-431-HOTCHUCK-001x-768x432.jpg 768w, https:\/\/adenso.solutions\/wp-content\/uploads\/2024\/06\/240624-431-HOTCHUCK-001x-1536x864.jpg 1536w, https:\/\/adenso.solutions\/wp-content\/uploads\/2024\/06\/240624-431-HOTCHUCK-001x-370x208.jpg 370w, https:\/\/adenso.solutions\/wp-content\/uploads\/2024\/06\/240624-431-HOTCHUCK-001x-1290x725.jpg 1290w, https:\/\/adenso.solutions\/wp-content\/uploads\/2024\/06\/240624-431-HOTCHUCK-001x-840x473.jpg 840w, https:\/\/adenso.solutions\/wp-content\/uploads\/2024\/06\/240624-431-HOTCHUCK-001x-410x231.jpg 410w, https:\/\/adenso.solutions\/wp-content\/uploads\/2024\/06\/240624-431-HOTCHUCK-001x-270x152.jpg 270w\" data-sizes=\"auto\" src=\"data:image\/svg+xml;base64,PHN2ZyB3aWR0aD0iMSIgaGVpZ2h0PSIxIiB4bWxucz0iaHR0cDovL3d3dy53My5vcmcvMjAwMC9zdmciPjwvc3ZnPg==\" style=\"--smush-placeholder-width: 2000px; --smush-placeholder-aspect-ratio: 2000\/1125;\" data-original-sizes=\"(max-width: 2000px) 100vw, 2000px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-8ac8d00 sc_fly_static elementor-widget elementor-widget-text-editor\" data-id=\"8ac8d00\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>The Adenso Scanner.Solutions are ideal for processing SiC wafers (silicon carbide), especially in combination with the heating chuck up to 1,000\u00b0C<br \/>New technologies such as SiC superjunction for SiC MOSFETS can be precisely processed and further developed on industrially proven Adenso solutions.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-3839669 elementor-section-boxed elementor-section-height-default elementor-section-height-default sc_fly_static\" data-id=\"3839669\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-extended\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-fa421f7 sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"fa421f7\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-4364db0 sc_height_huge sc_fly_static elementor-widget elementor-widget-spacer\" data-id=\"4364db0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-353d8b5 scheme_default elementor-section-boxed elementor-section-height-default elementor-section-height-default sc_fly_static\" data-id=\"353d8b5\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-extended\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-03d68e3 sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"03d68e3\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-5147440 elementor-section-boxed elementor-section-height-default elementor-section-height-default sc_fly_static\" data-id=\"5147440\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-inner-column elementor-element elementor-element-8d1c8ac sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"8d1c8ac\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-1e62dab sc_fly_static elementor-widget elementor-widget-text-editor\" data-id=\"1e62dab\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<div style=\"font-weight: 400;\">Ion implantation systems are\u00a0<strong>always configured customer-specifically<\/strong>\u00a0\u2013 so contact us now and send us your requirements, ideas and sketches!<\/div><p><a class=\"sc_button sc_button_hover sc_button_size_normal sc_button_icon_left\" style=\"margin-top: 15px;\" href=\"\/en\/contact\" rel=\"noopener\">Contact<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-72fdda5 elementor-section-boxed elementor-section-height-default elementor-section-height-default sc_fly_static\" data-id=\"72fdda5\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-extended\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-568a0fb sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"568a0fb\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-32360a2 sc_height_huge sc_fly_static elementor-widget elementor-widget-spacer\" data-id=\"32360a2\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section-with-custom-width elementor-section elementor-top-section elementor-element elementor-element-58d5acd elementor-section-content-middle scheme_dark sc_parallax elementor-section-stretched elementor-section-boxed elementor-section-height-default elementor-section-height-default sc_fly_static sc_parallax_default\" data-parallax-params=\"{&quot;parallax&quot;:1,&quot;flow&quot;:&quot;default&quot;,&quot;crop&quot;:&quot;none&quot;,&quot;range_start&quot;:5,&quot;range_end&quot;:25,&quot;sticky_offset&quot;:0,&quot;ease&quot;:&quot;power2&quot;,&quot;duration&quot;:2,&quot;delay&quot;:0,&quot;squeeze&quot;:2,&quot;lag&quot;:0,&quot;x_start&quot;:&quot;&quot;,&quot;x_start_unit&quot;:&quot;vw&quot;,&quot;x_end&quot;:&quot;&quot;,&quot;x_end_unit&quot;:&quot;vw&quot;,&quot;y_start&quot;:0,&quot;y_start_unit&quot;:&quot;px&quot;,&quot;y_end&quot;:0,&quot;y_end_unit&quot;:&quot;px&quot;,&quot;scale_start&quot;:100,&quot;scale_end&quot;:100,&quot;rotate_start&quot;:0,&quot;rotate_end&quot;:0,&quot;opacity_start&quot;:1,&quot;opacity_end&quot;:1,&quot;crop_start&quot;:0,&quot;crop_end&quot;:100,&quot;text&quot;:&quot;block&quot;,&quot;text_separate&quot;:0,&quot;text_wrap&quot;:0,&quot;mouse&quot;:0,&quot;mouse_type&quot;:&quot;transform3d&quot;,&quot;mouse_tilt_amount&quot;:70,&quot;mouse_speed&quot;:10,&quot;mouse_z&quot;:&quot;&quot;,&quot;mouse_handler&quot;:&quot;row&quot;}\" data-id=\"58d5acd\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;,&quot;stretch_section&quot;:&quot;section-stretched&quot;}\">\n\t\t\t\t\t\t\t<div class=\"elementor-background-overlay\"><\/div>\n\t\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-extended\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-65f13d2 sc-mobile_content_align_inherit sc_inner_width_none sc_content_align_inherit sc_layouts_column_icons_position_left sc_fly_static\" data-id=\"65f13d2\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-061d267 sc_height_large sc_fly_static elementor-widget elementor-widget-spacer\" data-id=\"061d267\" data-element_type=\"widget\" data-e-type=\"widget\" id=\"anfrage\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c74e3f4 sc_fly_static elementor-widget elementor-widget-trx_sc_title\" data-id=\"c74e3f4\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"trx_sc_title.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div\t\tclass=\"sc_title sc_title_default\" ><h2 class=\"sc_item_title sc_title_title sc_item_title_style_default sc_item_title_tag trx_addons_inline_1996480208 sc_typed\"\n\t\t\t><span class=\"sc_item_title_text\">Are you interested?<br>\nJust ask for your desired module...<\/span><\/h2><\/div>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7b55ab7 sc_fly_static elementor-widget elementor-widget-spacer\" data-id=\"7b55ab7\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4aa133e sc_fly_static elementor-widget elementor-widget-shortcode\" data-id=\"4aa133e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"shortcode.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-shortcode\"><div class=\"forminator-ui forminator-custom-form forminator-custom-form-43626 forminator-design--material forminator-custom forminator_ajax\" data-forminator-render=\"1\" data-form=\"forminator-module-43626\" data-uid=\"69e640939051d\"><br\/><\/div><form\r\n\t\t\t\tid=\"forminator-module-43626\"\r\n\t\t\t\tclass=\"forminator-ui forminator-custom-form forminator-custom-form-43626 forminator-design--material forminator-custom forminator_ajax\"\r\n\t\t\t\tmethod=\"post\"\r\n\t\t\t\tdata-forminator-render=\"1\"\r\n\t\t\t\tdata-form-id=\"43626\"\r\n\t\t\t\t data-color-option=\"default\" data-design=\"material\" data-grid=\"custom\" style=\"display: none;\"\r\n\t\t\t\tdata-uid=\"69e640939051d\"\r\n\t\t\t><div role=\"alert\" aria-live=\"polite\" class=\"forminator-response-message forminator-error\" aria-hidden=\"true\"><\/div><div class=\"forminator-row\"><div id=\"name-1\" class=\"forminator-field-name forminator-col forminator-col-6 \"><div class=\"forminator-field\"><label for=\"forminator-field-name-1_69e640939051d\" id=\"forminator-field-name-1_69e640939051d-label\" class=\"forminator-label\">first name <span class=\"forminator-required\">*<\/span><\/label><input type=\"text\" name=\"name-1\" value=\"\" placeholder=\"\" id=\"forminator-field-name-1_69e640939051d\" class=\"forminator-input forminator-name--field\" aria-required=\"true\" autocomplete=\"name\" \/><\/div><\/div><div id=\"name-2\" class=\"forminator-field-name forminator-col forminator-col-6 \"><div class=\"forminator-field\"><label for=\"forminator-field-name-2_69e640939051d\" id=\"forminator-field-name-2_69e640939051d-label\" class=\"forminator-label\">last name <span class=\"forminator-required\">*<\/span><\/label><input type=\"text\" name=\"name-2\" value=\"\" placeholder=\"\" id=\"forminator-field-name-2_69e640939051d\" class=\"forminator-input forminator-name--field\" aria-required=\"true\" autocomplete=\"name\" \/><\/div><\/div><\/div><div class=\"forminator-row\"><div id=\"text-1\" class=\"forminator-field-text forminator-col forminator-col-12 \"><div class=\"forminator-field\"><label for=\"forminator-field-text-1_69e640939051d\" id=\"forminator-field-text-1_69e640939051d-label\" class=\"forminator-label\">company<\/label><input type=\"text\" name=\"text-1\" value=\"\" placeholder=\"\" id=\"forminator-field-text-1_69e640939051d\" class=\"forminator-input forminator-name--field\" data-required=\"\" \/><\/div><\/div><\/div><div class=\"forminator-row\"><div id=\"email-1\" class=\"forminator-field-email forminator-col forminator-col-6 \"><div class=\"forminator-field\"><label for=\"forminator-field-email-1_69e640939051d\" id=\"forminator-field-email-1_69e640939051d-label\" class=\"forminator-label\">email <span class=\"forminator-required\">*<\/span><\/label><input type=\"email\" name=\"email-1\" value=\"\" placeholder=\"\" id=\"forminator-field-email-1_69e640939051d\" class=\"forminator-input forminator-email--field\" data-required=\"true\" aria-required=\"true\" autocomplete=\"email\" \/><\/div><\/div><div id=\"phone-1\" class=\"forminator-field-phone forminator-col forminator-col-6 \"><div class=\"forminator-field\"><label for=\"forminator-field-phone-1_69e640939051d\" id=\"forminator-field-phone-1_69e640939051d-label\" class=\"forminator-label\">phone<\/label><input type=\"text\" name=\"phone-1\" value=\"\" placeholder=\"\" id=\"forminator-field-phone-1_69e640939051d\" class=\"forminator-input forminator-field--phone\" data-required=\"\" aria-required=\"false\" autocomplete=\"off\" \/><\/div><\/div><\/div><div class=\"forminator-row\"><div id=\"checkbox-1\" class=\"forminator-field-checkbox forminator-col forminator-col-12 \"><div role=\"group\" class=\"forminator-field required\" aria-labelledby=\"forminator-checkbox-group-forminator-field-checkbox-1-69e640939051d-label\"><span id=\"forminator-checkbox-group-forminator-field-checkbox-1-69e640939051d-label\" class=\"forminator-label\">Handling.Module <span class=\"forminator-required\">*<\/span><\/span><label id=\"forminator-field-checkbox-1-1-69e640939051d-label\" for=\"forminator-field-checkbox-1-1-69e640939051d\" class=\"forminator-checkbox\" title=\"LLM LoadLock.Module\"><input type=\"checkbox\" name=\"checkbox-1[]\" value=\"one\" id=\"forminator-field-checkbox-1-1-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-1-1-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">LLM LoadLock.Module<\/span><\/label><label id=\"forminator-field-checkbox-1-2-69e640939051d-label\" for=\"forminator-field-checkbox-1-2-69e640939051d\" class=\"forminator-checkbox\" title=\"MLL ManualLoadLock.Module\"><input type=\"checkbox\" name=\"checkbox-1[]\" value=\"two\" id=\"forminator-field-checkbox-1-2-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-1-2-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">MLL ManualLoadLock.Module<\/span><\/label><label id=\"forminator-field-checkbox-1-3-69e640939051d-label\" for=\"forminator-field-checkbox-1-3-69e640939051d\" class=\"forminator-checkbox\" title=\"adLOAD | advanced High.Capacity LoadLock.Module\"><input type=\"checkbox\" name=\"checkbox-1[]\" value=\"Elektro-Planer---Projekt-Manager-(m,w,d)\" id=\"forminator-field-checkbox-1-3-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-1-3-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">adLOAD | advanced High.Capacity LoadLock.Module<\/span><\/label><label id=\"forminator-field-checkbox-1-4-69e640939051d-label\" for=\"forminator-field-checkbox-1-4-69e640939051d\" class=\"forminator-checkbox\" title=\"FLP FOUP300 VAC.LOADPORT\"><input type=\"checkbox\" name=\"checkbox-1[]\" value=\"Mechatroniker-(m,w,d)\" id=\"forminator-field-checkbox-1-4-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-1-4-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">FLP FOUP300 VAC.LOADPORT<\/span><\/label><\/div><\/div><\/div><div class=\"forminator-row\"><div id=\"checkbox-2\" class=\"forminator-field-checkbox forminator-col forminator-col-12 \"><div role=\"group\" class=\"forminator-field required\" aria-labelledby=\"forminator-checkbox-group-forminator-field-checkbox-2-69e640939051d-label\"><span id=\"forminator-checkbox-group-forminator-field-checkbox-2-69e640939051d-label\" class=\"forminator-label\">Alignment.Module <span class=\"forminator-required\">*<\/span><\/span><label id=\"forminator-field-checkbox-2-1-69e640939051d-label\" for=\"forminator-field-checkbox-2-1-69e640939051d\" class=\"forminator-checkbox\" title=\"WAM WaferAlign\u00adment.Module\"><input type=\"checkbox\" name=\"checkbox-2[]\" value=\"one\" id=\"forminator-field-checkbox-2-1-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-2-1-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">WAM WaferAlign\u00adment.Module<\/span><\/label><label id=\"forminator-field-checkbox-2-2-69e640939051d-label\" for=\"forminator-field-checkbox-2-2-69e640939051d\" class=\"forminator-checkbox\" title=\"AAM AutoAlign.Module\"><input type=\"checkbox\" name=\"checkbox-2[]\" value=\"AAM-AutoAlign.Module\" id=\"forminator-field-checkbox-2-2-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-2-2-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">AAM AutoAlign.Module<\/span><\/label><label id=\"forminator-field-checkbox-2-3-69e640939051d-label\" for=\"forminator-field-checkbox-2-3-69e640939051d\" class=\"forminator-checkbox\" title=\"WFM WaferFlip.Module\"><input type=\"checkbox\" name=\"checkbox-2[]\" value=\"WFM-WaferFlip.Module\" id=\"forminator-field-checkbox-2-3-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-2-3-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">WFM WaferFlip.Module<\/span><\/label><label id=\"forminator-field-checkbox-2-4-69e640939051d-label\" for=\"forminator-field-checkbox-2-4-69e640939051d\" class=\"forminator-checkbox\" title=\"WXM WaferExchange.Module\"><input type=\"checkbox\" name=\"checkbox-2[]\" value=\"WXM-WaferExchange.Module\" id=\"forminator-field-checkbox-2-4-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-2-4-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">WXM WaferExchange.Module<\/span><\/label><label id=\"forminator-field-checkbox-2-5-69e640939051d-label\" for=\"forminator-field-checkbox-2-5-69e640939051d\" class=\"forminator-checkbox\" title=\"EEX EndeffectorExchange.Module\"><input type=\"checkbox\" name=\"checkbox-2[]\" value=\"EEX-EndeffectorExchange.Module\" id=\"forminator-field-checkbox-2-5-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-2-5-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">EEX EndeffectorExchange.Module<\/span><\/label><\/div><\/div><\/div><div class=\"forminator-row\"><div id=\"checkbox-3\" class=\"forminator-field-checkbox forminator-col forminator-col-12 \"><div role=\"group\" class=\"forminator-field required\" aria-labelledby=\"forminator-checkbox-group-forminator-field-checkbox-3-69e640939051d-label\"><span id=\"forminator-checkbox-group-forminator-field-checkbox-3-69e640939051d-label\" class=\"forminator-label\">Processing.Module <span class=\"forminator-required\">*<\/span><\/span><label id=\"forminator-field-checkbox-3-1-69e640939051d-label\" for=\"forminator-field-checkbox-3-1-69e640939051d\" class=\"forminator-checkbox\" title=\"adHEAT | advanced Heating Solutions\"><input type=\"checkbox\" name=\"checkbox-3[]\" value=\"one\" id=\"forminator-field-checkbox-3-1-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-3-1-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">adHEAT | advanced Heating Solutions<\/span><\/label><label id=\"forminator-field-checkbox-3-2-69e640939051d-label\" for=\"forminator-field-checkbox-3-2-69e640939051d\" class=\"forminator-checkbox\" title=\"adVAC | advanced Vacuum Pressure Control\"><input type=\"checkbox\" name=\"checkbox-3[]\" value=\"adVAC-|-advanced-Vacuum-Pressure-Control\" id=\"forminator-field-checkbox-3-2-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-3-2-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">adVAC | advanced Vacuum Pressure Control<\/span><\/label><label id=\"forminator-field-checkbox-3-3-69e640939051d-label\" for=\"forminator-field-checkbox-3-3-69e640939051d\" class=\"forminator-checkbox\" title=\"adJET | advanced DUT pressure control\"><input type=\"checkbox\" name=\"checkbox-3[]\" value=\"adJET-|-advanced-DUT-pressure-control\" id=\"forminator-field-checkbox-3-3-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-3-3-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">adJET | advanced DUT pressure control<\/span><\/label><label id=\"forminator-field-checkbox-3-4-69e640939051d-label\" for=\"forminator-field-checkbox-3-4-69e640939051d\" class=\"forminator-checkbox\" title=\"STEALTH.CARRIER\"><input type=\"checkbox\" name=\"checkbox-3[]\" value=\"STEALTH.CARRIER\" id=\"forminator-field-checkbox-3-4-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-3-4-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">STEALTH.CARRIER<\/span><\/label><label id=\"forminator-field-checkbox-3-5-69e640939051d-label\" for=\"forminator-field-checkbox-3-5-69e640939051d\" class=\"forminator-checkbox\" title=\"Implanter.Module\"><input type=\"checkbox\" name=\"checkbox-3[]\" value=\"Implanter.Module\" id=\"forminator-field-checkbox-3-5-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-3-5-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">Implanter.Module<\/span><\/label><label id=\"forminator-field-checkbox-3-6-69e640939051d-label\" for=\"forminator-field-checkbox-3-6-69e640939051d\" class=\"forminator-checkbox\" title=\"SSS SubstrateScanner.Solutions\"><input type=\"checkbox\" name=\"checkbox-3[]\" value=\"SSS-SubstrateScanner.Solutions\" id=\"forminator-field-checkbox-3-6-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-3-6-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">SSS SubstrateScanner.Solutions<\/span><\/label><\/div><\/div><\/div><div class=\"forminator-row\"><div id=\"checkbox-5\" class=\"forminator-field-checkbox forminator-col forminator-col-12 \"><div role=\"group\" class=\"forminator-field required\" aria-labelledby=\"forminator-checkbox-group-forminator-field-checkbox-5-69e640939051d-label\"><span id=\"forminator-checkbox-group-forminator-field-checkbox-5-69e640939051d-label\" class=\"forminator-label\">More.Solutions <span class=\"forminator-required\">*<\/span><\/span><label id=\"forminator-field-checkbox-5-1-69e640939051d-label\" for=\"forminator-field-checkbox-5-1-69e640939051d\" class=\"forminator-checkbox\" title=\"VSC VacuumSuitcase\"><input type=\"checkbox\" name=\"checkbox-5[]\" value=\"one\" id=\"forminator-field-checkbox-5-1-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-5-1-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">VSC VacuumSuitcase<\/span><\/label><label id=\"forminator-field-checkbox-5-2-69e640939051d-label\" for=\"forminator-field-checkbox-5-2-69e640939051d\" class=\"forminator-checkbox\" title=\"CleanTec.Solutions\"><input type=\"checkbox\" name=\"checkbox-5[]\" value=\"tow\" id=\"forminator-field-checkbox-5-2-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-5-2-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">CleanTec.Solutions<\/span><\/label><\/div><\/div><\/div><div class=\"forminator-row\"><div id=\"checkbox-4\" class=\"forminator-field-checkbox forminator-col forminator-col-12 \"><div role=\"group\" class=\"forminator-field required\" aria-labelledby=\"forminator-checkbox-group-forminator-field-checkbox-4-69e640939051d-label\"><span id=\"forminator-checkbox-group-forminator-field-checkbox-4-69e640939051d-label\" class=\"forminator-label\">adCLUSTER \u2013 advanced MULTI.CLUSTER Solutions <span class=\"forminator-required\">*<\/span><\/span><label id=\"forminator-field-checkbox-4-1-69e640939051d-label\" for=\"forminator-field-checkbox-4-1-69e640939051d\" class=\"forminator-checkbox\" title=\"adCLUSTER\"><input type=\"checkbox\" name=\"checkbox-4[]\" value=\"one\" id=\"forminator-field-checkbox-4-1-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-4-1-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">adCLUSTER<\/span><\/label><label id=\"forminator-field-checkbox-4-2-69e640939051d-label\" for=\"forminator-field-checkbox-4-2-69e640939051d\" class=\"forminator-checkbox\" title=\"LIM Link.Module\"><input type=\"checkbox\" name=\"checkbox-4[]\" value=\"LIM-Link.Module\" id=\"forminator-field-checkbox-4-2-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-4-2-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">LIM Link.Module<\/span><\/label><label id=\"forminator-field-checkbox-4-3-69e640939051d-label\" for=\"forminator-field-checkbox-4-3-69e640939051d\" class=\"forminator-checkbox\" title=\"DLM DualLink.Module\"><input type=\"checkbox\" name=\"checkbox-4[]\" value=\"DLM-DualLink.Module\" id=\"forminator-field-checkbox-4-3-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-4-3-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">DLM DualLink.Module<\/span><\/label><\/div><\/div><\/div><div class=\"forminator-row\"><div id=\"checkbox-12\" class=\"forminator-field-checkbox forminator-col forminator-col-12 \"><div role=\"group\" class=\"forminator-field required\" aria-labelledby=\"forminator-checkbox-group-forminator-field-checkbox-12-69e640939051d-label\"><span id=\"forminator-checkbox-group-forminator-field-checkbox-12-69e640939051d-label\" class=\"forminator-label\">Software.Solutions <span class=\"forminator-required\">*<\/span><\/span><label id=\"forminator-field-checkbox-12-1-69e640939051d-label\" for=\"forminator-field-checkbox-12-1-69e640939051d\" class=\"forminator-checkbox\" title=\"adCONTROL \u2013 Cluster Control System\"><input type=\"checkbox\" name=\"checkbox-12[]\" value=\"one\" id=\"forminator-field-checkbox-12-1-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-12-1-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">adCONTROL \u2013 Cluster Control System<\/span><\/label><label id=\"forminator-field-checkbox-12-2-69e640939051d-label\" for=\"forminator-field-checkbox-12-2-69e640939051d\" class=\"forminator-checkbox\" title=\"ToolCloud \u2013 Anlagenmonitoring f\u00fcr Industrie 4.0\"><input type=\"checkbox\" name=\"checkbox-12[]\" value=\"tow\" id=\"forminator-field-checkbox-12-2-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-12-2-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">ToolCloud \u2013 Anlagenmonitoring f\u00fcr Industrie 4.0<\/span><\/label><\/div><\/div><\/div><div class=\"forminator-row\"><div id=\"checkbox-8\" class=\"forminator-field-checkbox forminator-col forminator-col-4 \"><div role=\"group\" class=\"forminator-field\" aria-labelledby=\"forminator-checkbox-group-forminator-field-checkbox-8-69e640939051d-label\"><span id=\"forminator-checkbox-group-forminator-field-checkbox-8-69e640939051d-label\" class=\"forminator-label\">Load.Module<\/span><label id=\"forminator-field-checkbox-8-1-69e640939051d-label\" for=\"forminator-field-checkbox-8-1-69e640939051d\" class=\"forminator-checkbox\" title=\"LLM LoadLock.Module\"><input type=\"checkbox\" name=\"checkbox-8[]\" value=\"one\" id=\"forminator-field-checkbox-8-1-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-8-1-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">LLM LoadLock.Module<\/span><\/label><label id=\"forminator-field-checkbox-8-2-69e640939051d-label\" for=\"forminator-field-checkbox-8-2-69e640939051d\" class=\"forminator-checkbox\" title=\"MLL ManualLoadLock.Module\"><input type=\"checkbox\" name=\"checkbox-8[]\" value=\"two\" id=\"forminator-field-checkbox-8-2-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-8-2-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">MLL ManualLoadLock.Module<\/span><\/label><label id=\"forminator-field-checkbox-8-3-69e640939051d-label\" for=\"forminator-field-checkbox-8-3-69e640939051d\" class=\"forminator-checkbox\" title=\"adLOAD | advanced High.Capacity LoadLock.Module\"><input type=\"checkbox\" name=\"checkbox-8[]\" value=\"Elektro-Planer---Projekt-Manager-(m,w,d)\" id=\"forminator-field-checkbox-8-3-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-8-3-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">adLOAD | advanced High.Capacity LoadLock.Module<\/span><\/label><label id=\"forminator-field-checkbox-8-4-69e640939051d-label\" for=\"forminator-field-checkbox-8-4-69e640939051d\" class=\"forminator-checkbox\" title=\"FLP FOUP300 VAC.LOADPORT\"><input type=\"checkbox\" name=\"checkbox-8[]\" value=\"Mechatroniker-(m,w,d)\" id=\"forminator-field-checkbox-8-4-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-8-4-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">FLP FOUP300 VAC.LOADPORT<\/span><\/label><\/div><\/div><div id=\"checkbox-7\" class=\"forminator-field-checkbox forminator-col forminator-col-4 \"><div role=\"group\" class=\"forminator-field\" aria-labelledby=\"forminator-checkbox-group-forminator-field-checkbox-7-69e640939051d-label\"><span id=\"forminator-checkbox-group-forminator-field-checkbox-7-69e640939051d-label\" class=\"forminator-label\">Alignment.Module<\/span><label id=\"forminator-field-checkbox-7-1-69e640939051d-label\" for=\"forminator-field-checkbox-7-1-69e640939051d\" class=\"forminator-checkbox\" title=\"WAM WaferAlign\u00adment.Module\"><input type=\"checkbox\" name=\"checkbox-7[]\" value=\"one\" id=\"forminator-field-checkbox-7-1-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-7-1-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">WAM WaferAlign\u00adment.Module<\/span><\/label><label id=\"forminator-field-checkbox-7-2-69e640939051d-label\" for=\"forminator-field-checkbox-7-2-69e640939051d\" class=\"forminator-checkbox\" title=\"AAM AutoAlign.Module\"><input type=\"checkbox\" name=\"checkbox-7[]\" value=\"AAM-AutoAlign.Module\" id=\"forminator-field-checkbox-7-2-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-7-2-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">AAM AutoAlign.Module<\/span><\/label><label id=\"forminator-field-checkbox-7-3-69e640939051d-label\" for=\"forminator-field-checkbox-7-3-69e640939051d\" class=\"forminator-checkbox\" title=\"WFM WaferFlip.Module\"><input type=\"checkbox\" name=\"checkbox-7[]\" value=\"WFM-WaferFlip.Module\" id=\"forminator-field-checkbox-7-3-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-7-3-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">WFM WaferFlip.Module<\/span><\/label><label id=\"forminator-field-checkbox-7-4-69e640939051d-label\" for=\"forminator-field-checkbox-7-4-69e640939051d\" class=\"forminator-checkbox\" title=\"WXM WaferExchange.Module\"><input type=\"checkbox\" name=\"checkbox-7[]\" value=\"WXM-WaferExchange.Module\" id=\"forminator-field-checkbox-7-4-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-7-4-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">WXM WaferExchange.Module<\/span><\/label><label id=\"forminator-field-checkbox-7-5-69e640939051d-label\" for=\"forminator-field-checkbox-7-5-69e640939051d\" class=\"forminator-checkbox\" title=\"EEX EndeffectorExchange.Module\"><input type=\"checkbox\" name=\"checkbox-7[]\" value=\"EEX-EndeffectorExchange.Module\" id=\"forminator-field-checkbox-7-5-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-7-5-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">EEX EndeffectorExchange.Module<\/span><\/label><\/div><\/div><div id=\"checkbox-6\" class=\"forminator-field-checkbox forminator-col forminator-col-4 \"><div role=\"group\" class=\"forminator-field\" aria-labelledby=\"forminator-checkbox-group-forminator-field-checkbox-6-69e640939051d-label\"><span id=\"forminator-checkbox-group-forminator-field-checkbox-6-69e640939051d-label\" class=\"forminator-label\">Processing.Module<\/span><label id=\"forminator-field-checkbox-6-1-69e640939051d-label\" for=\"forminator-field-checkbox-6-1-69e640939051d\" class=\"forminator-checkbox\" title=\"adHEAT | advanced Heating Solutions\"><input type=\"checkbox\" name=\"checkbox-6[]\" value=\"one\" id=\"forminator-field-checkbox-6-1-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-6-1-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">adHEAT | advanced Heating Solutions<\/span><\/label><label id=\"forminator-field-checkbox-6-2-69e640939051d-label\" for=\"forminator-field-checkbox-6-2-69e640939051d\" class=\"forminator-checkbox\" title=\"adVAC | advanced Vacuum Pressure Control\"><input type=\"checkbox\" name=\"checkbox-6[]\" value=\"adVAC-|-advanced-Vacuum-Pressure-Control\" id=\"forminator-field-checkbox-6-2-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-6-2-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">adVAC | advanced Vacuum Pressure Control<\/span><\/label><label id=\"forminator-field-checkbox-6-3-69e640939051d-label\" for=\"forminator-field-checkbox-6-3-69e640939051d\" class=\"forminator-checkbox\" title=\"adJET | advanced DUT pressure control\"><input type=\"checkbox\" name=\"checkbox-6[]\" value=\"adJET-|-advanced-DUT-pressure-control\" id=\"forminator-field-checkbox-6-3-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-6-3-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">adJET | advanced DUT pressure control<\/span><\/label><label id=\"forminator-field-checkbox-6-4-69e640939051d-label\" for=\"forminator-field-checkbox-6-4-69e640939051d\" class=\"forminator-checkbox\" title=\"STEALTH.CARRIER\"><input type=\"checkbox\" name=\"checkbox-6[]\" value=\"STEALTH.CARRIER\" id=\"forminator-field-checkbox-6-4-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-6-4-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">STEALTH.CARRIER<\/span><\/label><\/div><\/div><\/div><div class=\"forminator-row\"><div id=\"checkbox-9\" class=\"forminator-field-checkbox forminator-col forminator-col-4 \"><div role=\"group\" class=\"forminator-field\" aria-labelledby=\"forminator-checkbox-group-forminator-field-checkbox-9-69e640939051d-label\"><span id=\"forminator-checkbox-group-forminator-field-checkbox-9-69e640939051d-label\" class=\"forminator-label\">adCLUSTER \u2013 advanced MULTI.CLUSTER Solutions<\/span><label id=\"forminator-field-checkbox-9-1-69e640939051d-label\" for=\"forminator-field-checkbox-9-1-69e640939051d\" class=\"forminator-checkbox\" title=\"adCLUSTER\"><input type=\"checkbox\" name=\"checkbox-9[]\" value=\"one\" id=\"forminator-field-checkbox-9-1-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-9-1-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">adCLUSTER<\/span><\/label><label id=\"forminator-field-checkbox-9-2-69e640939051d-label\" for=\"forminator-field-checkbox-9-2-69e640939051d\" class=\"forminator-checkbox\" title=\"LIM Link.Module\"><input type=\"checkbox\" name=\"checkbox-9[]\" value=\"LIM-Link.Module\" id=\"forminator-field-checkbox-9-2-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-9-2-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">LIM Link.Module<\/span><\/label><label id=\"forminator-field-checkbox-9-3-69e640939051d-label\" for=\"forminator-field-checkbox-9-3-69e640939051d\" class=\"forminator-checkbox\" title=\"DLM DualLink.Module\"><input type=\"checkbox\" name=\"checkbox-9[]\" value=\"DLM-DualLink.Module\" id=\"forminator-field-checkbox-9-3-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-9-3-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">DLM DualLink.Module<\/span><\/label><\/div><\/div><div id=\"checkbox-11\" class=\"forminator-field-checkbox forminator-col forminator-col-4 \"><div role=\"group\" class=\"forminator-field\" aria-labelledby=\"forminator-checkbox-group-forminator-field-checkbox-11-69e640939051d-label\"><span id=\"forminator-checkbox-group-forminator-field-checkbox-11-69e640939051d-label\" class=\"forminator-label\">Software.Solutions<\/span><label id=\"forminator-field-checkbox-11-1-69e640939051d-label\" for=\"forminator-field-checkbox-11-1-69e640939051d\" class=\"forminator-checkbox\" title=\"adCONTROL \u2013 Cluster Control System\"><input type=\"checkbox\" name=\"checkbox-11[]\" value=\"one\" id=\"forminator-field-checkbox-11-1-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-11-1-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">adCONTROL \u2013 Cluster Control System<\/span><\/label><label id=\"forminator-field-checkbox-11-2-69e640939051d-label\" for=\"forminator-field-checkbox-11-2-69e640939051d\" class=\"forminator-checkbox\" title=\"ToolCloud \u2013 Monitoring for industry 4.0\"><input type=\"checkbox\" name=\"checkbox-11[]\" value=\"tow\" id=\"forminator-field-checkbox-11-2-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-11-2-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">ToolCloud \u2013 Monitoring for industry 4.0<\/span><\/label><\/div><\/div><div id=\"checkbox-10\" class=\"forminator-field-checkbox forminator-col forminator-col-4 \"><div role=\"group\" class=\"forminator-field\" aria-labelledby=\"forminator-checkbox-group-forminator-field-checkbox-10-69e640939051d-label\"><span id=\"forminator-checkbox-group-forminator-field-checkbox-10-69e640939051d-label\" class=\"forminator-label\">More.Solutions<\/span><label id=\"forminator-field-checkbox-10-1-69e640939051d-label\" for=\"forminator-field-checkbox-10-1-69e640939051d\" class=\"forminator-checkbox\" title=\"VSC VacuumSuitcase\"><input type=\"checkbox\" name=\"checkbox-10[]\" value=\"one\" id=\"forminator-field-checkbox-10-1-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-10-1-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">VSC VacuumSuitcase<\/span><\/label><label id=\"forminator-field-checkbox-10-2-69e640939051d-label\" for=\"forminator-field-checkbox-10-2-69e640939051d\" class=\"forminator-checkbox\" title=\"CleanTec.Solutions\"><input type=\"checkbox\" name=\"checkbox-10[]\" value=\"tow\" id=\"forminator-field-checkbox-10-2-69e640939051d\" aria-labelledby=\"forminator-field-checkbox-10-2-69e640939051d-label\" data-calculation=\"0\"   data-hidden-behavior=\"zero\"\/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><span class=\"forminator-checkbox-label\">CleanTec.Solutions<\/span><\/label><\/div><\/div><\/div><div class=\"forminator-row\"><div id=\"textarea-1\" class=\"forminator-field-textarea forminator-col forminator-col-12 \"><div class=\"forminator-field\"><label for=\"forminator-field-textarea-1_69e640939051d\" id=\"forminator-field-textarea-1_69e640939051d-label\" class=\"forminator-label\">message<\/label><textarea name=\"textarea-1\" placeholder=\"\" id=\"forminator-field-textarea-1_69e640939051d\" class=\"forminator-textarea\" rows=\"6\" style=\"--forminator-textarea-min-height:140px;\" maxlength=\"180\" ><\/textarea><span id=\"forminator-field-textarea-1_69e640939051d-description\" class=\"forminator-description\"><span data-limit=\"180\" data-type=\"characters\" data-editor=\"\">0 \/ 180<\/span><\/span><\/div><\/div><\/div><div class=\"forminator-row\"><div id=\"consent-1\" class=\"forminator-field-consent forminator-col forminator-col-12 \"><div class=\"forminator-field\"><label for=\"forminator-field-consent-1_69e640939051d\" id=\"forminator-field-consent-1_69e640939051d-label\" class=\"forminator-label\">privacy polity <span class=\"forminator-required\">*<\/span><\/label><div class=\"forminator-checkbox__wrapper\"><label id=\"forminator-field-consent-1_69e640939051d__label\" class=\"forminator-checkbox forminator-consent\"><input type=\"checkbox\" name=\"consent-1\" id=\"forminator-field-consent-1_69e640939051d\" value=\"checked\" aria-labelledby=\"forminator-field-consent-1_69e640939051d-label\" aria-describedby=\"forminator-field-consent-1_69e640939051d__description\" data-required=\"true\" aria-required=\"true\" \/><span class=\"forminator-checkbox-box\" aria-hidden=\"true\"><\/span><\/label><div id=\"forminator-field-consent-1_69e640939051d__description\" class=\"forminator-checkbox__label forminator-consent__label\"><div class=\"gfield_description gfield_consent_description\" id=\"gfield_consent_description_3_6\">I hereby consent to my data being used for the purpose of contacting me. Further information can be found at: <a href=\"\/en\/privacy-policy\/\">Privacy policy<\/a><\/div><\/div><\/div><\/div><\/div><\/div><div class=\"forminator-row\"><div id=\"captcha-1\" class=\"forminator-field-captcha forminator-col forminator-col-12 \"><div class=\"forminator-captcha-left forminator-hcaptcha\" data-theme=\"light\"  data-sitekey=\"168a9109-f980-41c6-a488-f2321e8b00e8\" data-size=\"normal\"><\/div> <\/div><\/div><div class=\"forminator-row forminator-hidden\"><div id=\"hidden-1\" class=\"forminator-field-hidden  forminator-col-12 \"><input type=\"hidden\" id=\"hidden-1_69e640939051d\" name=\"hidden-1\" value=\"44852\" \/><\/div><\/div><input type=\"hidden\" name=\"referer_url\" value=\"\" \/><div class=\"forminator-row forminator-row-last\"><div class=\"forminator-col\"><div class=\"forminator-field\"><button class=\"forminator-button forminator-button-submit\"><span>send<\/span><span aria-hidden=\"true\"><\/span><\/button><\/div><\/div><\/div><input type=\"hidden\" id=\"forminator_nonce\" name=\"forminator_nonce\" value=\"7c792b2060\" \/><input type=\"hidden\" name=\"_wp_http_referer\" value=\"\/en\/wp-json\/wp\/v2\/pages\/44852\" \/><input type=\"hidden\" name=\"form_id\" value=\"43626\"><input type=\"hidden\" name=\"page_id\" value=\"44852\"><input type=\"hidden\" name=\"form_type\" value=\"default\"><input type=\"hidden\" name=\"current_url\" value=\"https:\/\/adenso.solutions\/en\/vac-robotics\/whm-waferhandling-module\/ion-implantation\/\"><input type=\"hidden\" name=\"render_id\" value=\"1\"><input type=\"hidden\" name=\"action\" value=\"forminator_submit_form_custom-forms\"><label for=\"input_21\" class=\"forminator-hidden\" aria-hidden=\"true\">Please do not fill in this field. <input id=\"input_21\" type=\"text\" name=\"input_21\" value=\"\" autocomplete=\"off\"><\/label><label for=\"input_21\" class=\"forminator-hidden\" aria-hidden=\"true\">Please do not fill in this field. <input id=\"input_21\" type=\"text\" name=\"input_21\" value=\"\" autocomplete=\"off\"><\/label><\/form><\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8dc3517 sc_height_huge sc_fly_static elementor-widget elementor-widget-spacer\" data-id=\"8dc3517\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>Module EndStations Ion implantation of substrates such as semiconductor wafers takes place in so-called end stations or implanter stations. Enquire now! Module WAM These consist mainly of the following modules:&hellip;<\/p>\n","protected":false},"author":1,"featured_media":44841,"parent":42041,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-44852","page","type-page","status-publish","has-post-thumbnail","hentry"],"_links":{"self":[{"href":"https:\/\/adenso.solutions\/en\/wp-json\/wp\/v2\/pages\/44852","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/adenso.solutions\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/adenso.solutions\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/adenso.solutions\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/adenso.solutions\/en\/wp-json\/wp\/v2\/comments?post=44852"}],"version-history":[{"count":21,"href":"https:\/\/adenso.solutions\/en\/wp-json\/wp\/v2\/pages\/44852\/revisions"}],"predecessor-version":[{"id":44882,"href":"https:\/\/adenso.solutions\/en\/wp-json\/wp\/v2\/pages\/44852\/revisions\/44882"}],"up":[{"embeddable":true,"href":"https:\/\/adenso.solutions\/en\/wp-json\/wp\/v2\/pages\/42041"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/adenso.solutions\/en\/wp-json\/wp\/v2\/media\/44841"}],"wp:attachment":[{"href":"https:\/\/adenso.solutions\/en\/wp-json\/wp\/v2\/media?parent=44852"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}